Problem drytek4 SNF 2008-04-29 07:23:59: Low water flow through lower electrode

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Apr 29 07:24:00 PDT 2008


OK to run for processes less than 30 min. long.  Previous test shows that even at a flow rate of 0.03gpm,  the outlet temperature only increased by 7 C after running 175W plasma for 35 min.
Please run a dummy wafer to verify your process before comitting your device.




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