From druist at snf.stanford.edu Fri May 2 16:39:53 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Fri, 2 May 2008 16:39:53 -0700 Subject: Problem drytek4 SNF 2008-05-02 16:39:52: cycle does not start Message-ID: looks like the pump is not working. When hit cycle start valve is open but the chamber does not evacuate. From eenriquez at snf.stanford.edu Mon May 5 10:09:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 May 2008 10:09:38 -0700 Subject: Shutdown drytek4 SNF 2008-05-05 10:09:38: Pump does not restart Message-ID: Installing a new pump. Should be completed by 2pm. From eenriquez at snf.stanford.edu Mon May 5 14:04:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 May 2008 14:04:48 -0700 Subject: Shutdown drytek4 SNF 2008-05-05 10:09:38: Pump does not restart Message-ID: Installed new vacuum pump (fomblin oil). Ran 9 minute O2 clean. From eenriquez at snf.stanford.edu Mon May 5 14:04:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 May 2008 14:04:56 -0700 Subject: Problem drytek4 SNF 2008-05-02 16:39:52: cycle does not start Message-ID: Installed new vacuum pump (fomblin oil). Ran 9 minute O2 clean. From tdo at snf.stanford.edu Mon May 5 19:27:25 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Mon, 5 May 2008 19:27:25 -0700 Subject: Problem drytek4 SNF 2008-05-05 19:27:25: machine light off Message-ID: Red "Machine ON light" off From jperez at snf.stanford.edu Tue May 6 07:05:35 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 6 May 2008 07:05:35 -0700 Subject: Shutdown drytek4 SNF 2008-05-06 07:05:35: Per operating procedures all light should be on Message-ID: From eenriquez at snf.stanford.edu Tue May 6 07:55:20 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 May 2008 07:55:20 -0700 Subject: Shutdown drytek4 SNF 2008-05-06 07:05:35: Per operating procedures all light should be on Message-ID: Replaced the burnt out light. Please amend the operating procedure so that it doesn't place the system in shutdown when its obvious that its only a burnt indicator light ( "System" light is off when the system is obviously ON) From druist at snf.stanford.edu Tue May 6 18:50:58 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Tue, 6 May 2008 18:50:58 -0700 Subject: Shutdown drytek4 SNF 2008-05-06 18:50:58: bad water leak in lower electrode cooling line Message-ID: started spraying water on to the floor while etching. stopped etch, turned off RF power, and closed cooling line valves. Cleaned up water from the floor w/ npatil using yellow adsorbant. Left machine in standby mode with cooling water shut off From eenriquez at snf.stanford.edu Wed May 7 15:37:20 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 May 2008 15:37:20 -0700 Subject: Comment drytek4 SNF 2008-05-07 15:37:19: Update Message-ID: Lower electrode water line blew out because of the high back pressure. Removed the lower electrode and found the oring grooves that holds the o-rings in the water channel seal had been eroded. As a result, the inlet and outlet o-rings collapsed into the water channel which then restricted the line. The plan is to have the Varian machine shop re-machince new o-ring grooves and replace all the o-rings. Will update on ETA. From eenriquez at snf.stanford.edu Fri May 9 10:51:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 May 2008 10:51:53 -0700 Subject: Comment drytek4 SNF 2008-05-09 10:51:53: Update Message-ID: Received repaired electrode. We will reassemble the electrode today and install it Monday morning. System should be ready by 3pm on Monday. From eenriquez at snf.stanford.edu Mon May 12 13:46:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 May 2008 13:46:38 -0700 Subject: Shutdown drytek4 SNF 2008-05-06 18:50:58: bad water leak in lower electrode cooling line Message-ID: Replaced leaky water lines. Repaired lower electrode's damaged water channels (oring groove had eroded away). Ran an O2 plasma for 20 minutes (light blue). Leak up rate was about 10 mT/min. From eenriquez at snf.stanford.edu Mon May 12 13:46:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 May 2008 13:46:47 -0700 Subject: Comment drytek4 SNF 2008-05-07 15:37:19: Update Message-ID: Replaced leaky water lines. Repaired lower electrode's damaged water channels (oring groove had eroded away). Ran an O2 plasma for 20 minutes (light blue). Leak up rate was about 10 mT/min. From eenriquez at snf.stanford.edu Mon May 12 13:47:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 May 2008 13:47:33 -0700 Subject: Comment drytek4 SNF 2008-05-09 10:51:53: Update Message-ID: Replaced leaky water lines. Repaired lower electrode's damaged water channels (oring groove had eroded away). Ran an O2 plasma for 20 minutes (light blue). Leak up rate was about 10 mT/min. From eenriquez at snf.stanford.edu Mon May 12 13:47:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 May 2008 13:47:57 -0700 Subject: Problem drytek4 SNF 2008-05-05 19:27:25: machine light off Message-ID: Replaced burnt light bulb From jperez at snf.stanford.edu Mon May 12 15:14:40 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 May 2008 15:14:40 -0700 Subject: Problem drytek4 SNF 2008-04-29 07:23:59: Low water flow through lower electrode Message-ID: Different MFC for lower electrode and at it's mark. OK t o use. From jperez at snf.stanford.edu Tue May 13 11:51:12 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 May 2008 11:51:12 -0700 Subject: Problem drytek4 SNF 2008-05-13 11:51:11: Lid isn't sitting correctly after lowering it. Message-ID: A thump sound when starting to pump chamber. From eenriquez at snf.stanford.edu Wed May 14 14:04:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 May 2008 14:04:04 -0700 Subject: Problem drytek4 SNF 2008-05-13 11:51:11: Lid isn't sitting correctly after lowering it. Message-ID: Leveled the lid. 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? ?: 76 ????:???????????,?????300? 0633-8228513 77 ????:?????282???(???????) 0633-6172695 ?????????????????????????????????????????????????????????????????????????????????? ??? 78 ??????:???????????????(??????300???) 13754677712 ??????????????????????????????????????????????????????????????????????????????????- ??????????????????????????????????????????????????????????????????????????????????- ?????????????????????????????????????????????????????????????????????????????????? ??? 79 ??????:?????????????????50? 0530-6137658 ?????????????????????????????????????????????????????????????????????????????????? ? ? ?: 80 ????:??????????????11-6? 0312-7519957 ??????????????????????????????????????????????????????????????????????????????????- ??????????????????????????????????????????????????????????????????????????????????- ?????????????????????????????????????????????????????????????????????????????????? ? ? ?: 81 ????:??????????13? 0512-53709604 82 ??????:???????????D?209? 13306291009 83 ??????:??????????(???????????) 0551-3466078 ??????????????????????????????????????????????????????????????????????????????????- ??????????????????????????????????????????????????????????????????????????????????- ?????????????????????????????????????????????????????????????????????????????????? ???: 84 ??????:???????????????? 0356-2232091 85 ????:??????????????????? 0355-6058278 ????????????????????????????????????????????????????????????????????????????????????- From cbaxter at snf.stanford.edu Sun May 18 11:02:54 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 May 2008 11:02:54 -0700 Subject: Problem drytek4 SNF 2008-03-19 07:27:08: Start button does NOT stay on when pressed Message-ID: Cleaned both start and process#1 push button switch with ipa. Cycled tool using two sequence step process w/out problem. From cbaxter at snf.stanford.edu Sun May 18 11:03:16 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 May 2008 11:03:16 -0700 Subject: Comment drytek4 SNF 2008-04-15 09:37:07: Update Message-ID: From gzxqfy at 163.com Wed May 21 13:44:05 2008 From: gzxqfy at 163.com (When quality is a requirement) Date: Thu, 22 May 2008 04:44:05 +0800 Subject: When quality is a requirement Message-ID: An HTML attachment was scrubbed... URL: From jparker at snf.stanford.edu Wed May 28 11:20:15 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 28 May 2008 11:20:15 -0700 Subject: Problem drytek4 SNF 2008-05-28 11:20:15: Leak check? Message-ID: Could we get a check on the leak-up rate please? Chamber seems to discolor faster than it has in months past using the same substrate and CHF3 recipe. I wonder if there is O2 and N2 leaking in and altering my recipe. From cbaxter at snf.stanford.edu Wed May 28 17:41:37 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 28 May 2008 17:41:37 -0700 Subject: Problem drytek4 SNF 2008-05-28 11:20:15: Leak check? Message-ID: Ran a 10mins leak rate and is at 2mt per min.