From haiwei at snf.stanford.edu Sat Aug 8 09:35:13 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sat, 8 Aug 2009 09:35:13 -0700 Subject: Problem drytek4 SNF 2009-08-08 09:35:12: Previous user left the machine in BAD standby Message-ID: Power was still on. O2 gas is also on. And the standby process was not loaded. From cbaxter at snf.stanford.edu Sun Aug 9 19:49:13 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 9 Aug 2009 19:49:13 -0700 Subject: Problem drytek4 SNF 2009-08-08 09:35:12: Previous user left the machine in BAD standby Message-ID: From dgunning at snf.stanford.edu Fri Aug 21 05:28:57 2009 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Fri, 21 Aug 2009 05:28:57 -0700 Subject: Problem drytek4 SNF 2009-08-21 05:28:56: power Message-ID: couldn't set forward/reflected power From dgunning at snf.stanford.edu Fri Aug 21 19:23:42 2009 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Fri, 21 Aug 2009 19:23:42 -0700 Subject: Comment drytek4 SNF 2009-08-21 19:23:42: previous problem... Message-ID: ..I only had this with process 2 (CHF3 and O2). This recipe worked fine on process 3. From tdo at snf.stanford.edu Sat Aug 22 12:03:28 2009 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sat, 22 Aug 2009 12:03:28 -0700 Subject: Problem drytek4 SNF 2009-08-22 12:03:28: lower electrode cooling Message-ID: lower electrode cooling water flow low From cbaxter at snf.stanford.edu Sun Aug 23 07:42:42 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Aug 2009 07:42:42 -0700 Subject: Problem drytek4 SNF 2009-08-22 12:03:28: lower electrode cooling Message-ID: Flushed lower electrode cooling line. From cbaxter at snf.stanford.edu Sun Aug 23 07:43:48 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Aug 2009 07:43:48 -0700 Subject: Problem drytek4 SNF 2009-08-21 05:28:56: power Message-ID: Run o2 plasma and was able to tuned with 100watts forward power and 0 reflective. From sclaussen at snf.stanford.edu Mon Aug 24 12:25:24 2009 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 24 Aug 2009 12:25:24 -0700 Subject: Comment drytek4 SNF 2009-08-24 12:25:23: Process 2 issue Message-ID: Same problem as dgunning- could not adjust the power using Process 2. Process 3 worked fine. From khoang at snf.stanford.edu Tue Aug 25 09:15:26 2009 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Tue, 25 Aug 2009 09:15:26 -0700 Subject: Comment drytek4 SNF 2009-08-25 09:15:25: system not in standby condition Message-ID: Right after enabling the "standby" button was on but the pressure of system was found to be at atmospheric pressure. From jimkruger at snf.stanford.edu Tue Aug 25 15:41:32 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 25 Aug 2009 15:41:32 -0700 Subject: Comment drytek4 SNF 2009-08-25 15:41:32: Process 2 looks OK Message-ID: I found the tuning way off. Starting point for ALL processes is Upper = "coil" = 0080 Lower = "cap" = 10.00.`, about full CW From haiwei at snf.stanford.edu Mon Aug 31 18:39:14 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Mon, 31 Aug 2009 18:39:14 -0700 Subject: Problem drytek4 SNF 2009-08-31 18:39:14: plasma is not stable Message-ID: can't have stable plasma with reflective power < 80.