Problem drytek4 SNF 2009-01-05 11:55:53: No RF power

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Jan 5 14:06:37 PST 2009

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Forgot to flip breaker up, sorry. I am doing a 40 min O2 clean.
When wiping chamber, some residue coming off  lid.

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