From eenriquez at snf.stanford.edu  Wed Jul  1 07:57:38 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 1 Jul 2009 07:57:38 -0700
Subject: Comment drytek4 SNF 2009-07-01 07:57:38: Update leak rate problem
Message-ID: <mailman.641.1357938328.25694.drytek4-pcs@snf.stanford.edu>

The electrode is currently at the machine shop.
The best estimate is that the system will be ready by Monday.



From eenriquez at snf.stanford.edu  Wed Jul  1 07:57:47 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 1 Jul 2009 07:57:47 -0700
Subject: Comment drytek4 SNF 2009-06-29 15:12:02: Update leak rate
Message-ID: <mailman.642.1357938328.25694.drytek4-pcs@snf.stanford.edu>

Archived



From jperez at snf.stanford.edu  Tue Jul  7 07:15:58 2009
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 7 Jul 2009 07:15:58 -0700
Subject: Comment drytek4 SNF 2009-05-20 22:37:21: report your etch!
Message-ID: <mailman.643.1357938328.25694.drytek4-pcs@snf.stanford.edu>

Took care of the problem and it shouldn't happen again.



From eenriquez at snf.stanford.edu  Wed Jul  8 14:38:38 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Jul 2009 14:38:38 -0700
Subject: Shutdown drytek4 SNF 2009-06-29 12:35:34: High leak rate
Message-ID: <mailman.644.1357938328.25694.drytek4-pcs@snf.stanford.edu>

Reassemble system and ran O2 plasma for 30 minutes.  Plasma color is blueish - white.  Leakup rate after the O2 plasma clean was about 2 mT/min.



From eenriquez at snf.stanford.edu  Wed Jul  8 14:40:55 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Jul 2009 14:40:55 -0700
Subject: Problem drytek4 SNF 2009-06-28 22:35:47: o2 plasma color
Message-ID: <mailman.645.1357938328.25694.drytek4-pcs@snf.stanford.edu>

Modified the electrode.  Reassemble system and ran O2 plasma for 30 minutes.  Plasma color is blueish - white.  Leakup rate after the O2 plasma clean was about 2 mT/min.



From eenriquez at snf.stanford.edu  Wed Jul  8 14:41:05 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Jul 2009 14:41:05 -0700
Subject: Comment drytek4 SNF 2009-06-30 13:48:52: Update leak rate
Message-ID: <mailman.646.1357938328.25694.drytek4-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed Jul  8 14:41:13 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Jul 2009 14:41:13 -0700
Subject: Comment drytek4 SNF 2009-07-01 07:57:38: Update leak rate problem
Message-ID: <mailman.647.1357938328.25694.drytek4-pcs@snf.stanford.edu>

Archived