Shutdown drytek4 SNF 2009-06-29 12:35:34: High leak rate

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 8 14:38:38 PDT 2009


Reassemble system and ran O2 plasma for 30 minutes.  Plasma color is blueish - white.  Leakup rate after the O2 plasma clean was about 2 mT/min.




More information about the drytek4-pcs mailing list