Problem drytek4 SNF 2009-06-28 22:35:47: o2 plasma color

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 8 14:40:55 PDT 2009


Modified the electrode.  Reassemble system and ran O2 plasma for 30 minutes.  Plasma color is blueish - white.  Leakup rate after the O2 plasma clean was about 2 mT/min.




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