From haiwei at snf.stanford.edu Sat Jun 6 12:54:36 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sat, 6 Jun 2009 12:54:36 -0700 Subject: Problem drytek4 SNF 2009-06-06 12:54:36: standby doesn't work Message-ID: From eenriquez at snf.stanford.edu Mon Jun 8 08:47:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 08:47:47 -0700 Subject: Problem drytek4 SNF 2009-06-06 12:54:36: standby doesn't work Message-ID: Replaced the STANDBY light bulb. From nppatil at snf.stanford.edu Tue Jun 9 15:30:32 2009 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Tue, 9 Jun 2009 15:30:32 -0700 Subject: Problem drytek4 SNF 2009-06-09 15:30:32: Standby button does not work Message-ID: From cbaxter at snf.stanford.edu Tue Jun 9 20:20:32 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 9 Jun 2009 20:20:32 -0700 Subject: Problem drytek4 SNF 2009-06-09 15:30:32: Standby button does not work Message-ID: Changed stand by button switch.. From rostam at snf.stanford.edu Wed Jun 10 00:15:05 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 10 Jun 2009 00:15:05 -0700 Subject: Problem drytek4 SNF 2009-06-10 00:15:04: leak Message-ID: ran o2 descum. the plasma is pink instead of dark blue indicating some nitrogen leak. From cbaxter at snf.stanford.edu Wed Jun 10 17:11:03 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 10 Jun 2009 17:11:03 -0700 Subject: Problem drytek4 SNF 2009-06-10 00:15:04: leak Message-ID: Run leak rate and its at 6mt per... From faridz at snf.stanford.edu Fri Jun 19 11:47:12 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 19 Jun 2009 11:47:12 -0700 Subject: Problem drytek4 SNF 2009-06-19 11:47:11: process 3 problem! Message-ID: Process 3 having issues with RF power.... FWD power fluctuate too much. From cbaxter at snf.stanford.edu Fri Jun 19 14:35:53 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 19 Jun 2009 14:35:53 -0700 Subject: Problem drytek4 SNF 2009-06-19 11:47:11: process 3 problem! Message-ID: From yeh at snf.stanford.edu Sat Jun 20 11:45:05 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Sat, 20 Jun 2009 11:45:05 -0700 Subject: Problem drytek4 SNF 2009-06-20 11:45:04: lid will not open Message-ID: From cbaxter at snf.stanford.edu Sat Jun 20 15:17:27 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 20 Jun 2009 15:17:27 -0700 Subject: Problem drytek4 SNF 2009-06-20 11:45:04: lid will not open Message-ID: Did not have problem venting the chamber and opening the chamber lid. From svo at snf.stanford.edu Mon Jun 22 16:48:43 2009 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Mon, 22 Jun 2009 16:48:43 -0700 Subject: Problem drytek4 SNF 2009-06-22 16:48:42: openning toggle Message-ID: chamber opening needs to be oiled since chamber does not slide up all the way. From eenriquez at snf.stanford.edu Tue Jun 23 08:12:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Jun 2009 08:12:27 -0700 Subject: Problem drytek4 SNF 2009-06-22 16:48:42: openning toggle Message-ID: Lubricated the chamber lid lift guide rod. From leoyu at snf.stanford.edu Thu Jun 25 19:03:54 2009 From: leoyu at snf.stanford.edu (leoyu at snf.stanford.edu) Date: Thu, 25 Jun 2009 19:03:54 -0700 Subject: Shutdown drytek4 SNF 2009-06-25 19:03:53: Chip missing inside the chamber Message-ID: Chip missing inside the chamber while unloading. Possibly falls into the hole inside the chamber. Shutdown the machine as usual, but is not sure if the machine will correctly work if RF power is on. From cbaxter at snf.stanford.edu Thu Jun 25 21:18:50 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 25 Jun 2009 21:18:50 -0700 Subject: Shutdown drytek4 SNF 2009-06-25 19:03:53: Chip missing inside the chamber Message-ID: Vented chamnber and did not see find a any wafer chip. From tdo at snf.stanford.edu Sun Jun 28 22:35:47 2009 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 28 Jun 2009 22:35:47 -0700 Subject: Problem drytek4 SNF 2009-06-28 22:35:47: o2 plasma color Message-ID: pure O2 plasma is pink instead of bluish-white From eenriquez at snf.stanford.edu Mon Jun 29 12:35:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Jun 2009 12:35:34 -0700 Subject: Shutdown drytek4 SNF 2009-06-29 12:35:34: High leak rate Message-ID: Chamber leak up rate is about 68 mT/min. Will leak check with He leak detector. From eenriquez at snf.stanford.edu Mon Jun 29 15:12:02 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Jun 2009 15:12:02 -0700 Subject: Comment drytek4 SNF 2009-06-29 15:12:02: Update leak rate Message-ID: Found leak at the wafer lift (center of electrode). Need to disassemble the electrode. From eenriquez at snf.stanford.edu Tue Jun 30 13:48:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Jun 2009 13:48:52 -0700 Subject: Comment drytek4 SNF 2009-06-30 13:48:52: Update leak rate Message-ID: Disassembled the electrode and found that the water cooling port is heavily clogged with green sand. Modifying the electrode to eliminate the cooling line clogging problem and also improve the vacuum seals in the electrode. No estimated time to repair yet.