From shott at snf.stanford.edu Fri Oct 2 16:55:23 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:55:23 -0700 Subject: Comment drytek4 SNF 2009-08-21 19:23:42: previous problem... Message-ID: To the archive .... From sqliu at snf.stanford.edu Fri Oct 9 12:25:07 2009 From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu) Date: Fri, 9 Oct 2009 12:25:07 -0700 Subject: Problem drytek4 SNF 2009-10-09 12:25:07: Reverse power Message-ID: reverse power reading the same as forward power. could not lower with cap and coil. process1 From cbaxter at snf.stanford.edu Sun Oct 11 21:53:02 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Oct 2009 21:53:02 -0700 Subject: Problem drytek4 SNF 2009-10-09 12:25:07: Reverse power Message-ID: The coupler inside the match came lose. Tighten coupler and run sf6/o2 gas w/out problem tuning to zero watts reflective with 150watts forward power. From jperez at snf.stanford.edu Mon Oct 12 08:03:24 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 08:03:24 -0700 Subject: Comment drytek4 SNF 2009-09-24 12:06:38: RF power supply breaker in up (=on) position Message-ID: Thanks for the information! From jperez at snf.stanford.edu Mon Oct 12 08:04:13 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 08:04:13 -0700 Subject: Comment drytek4 SNF 2009-08-25 09:15:25: system not in standby condition Message-ID: Thanks for the information! From jperez at snf.stanford.edu Mon Oct 12 08:10:44 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 08:10:44 -0700 Subject: Comment drytek4 SNF 2009-08-25 15:41:32: Process 2 looks OK Message-ID: Thanks for that important information! From jperez at snf.stanford.edu Mon Oct 12 08:12:28 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 08:12:28 -0700 Subject: Comment drytek4 SNF 2009-08-24 12:25:23: Process 2 issue Message-ID: Jim Kruger's information on set points for upper and lower pots, should of resolved this problem. From cbaxter at snf.stanford.edu Wed Oct 14 17:37:08 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Oct 2009 17:37:08 -0700 Subject: Problem drytek4 SNF 2009-09-23 16:43:29: Needs a a process qual Message-ID: From jimkruger at snf.stanford.edu Mon Oct 19 15:28:12 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 19 Oct 2009 15:28:12 -0700 Subject: Shutdown drytek4 SNF 2009-10-19 15:28:12: Drytek4 not responding Message-ID: chuck water flow = about zero. No response except to "Micro reset" which does not seem to change anything. Tried dis-able, re-enable: no change. From eenriquez at snf.stanford.edu Tue Oct 20 14:51:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Oct 2009 14:51:21 -0700 Subject: Shutdown drytek4 SNF 2009-10-19 15:28:12: Drytek4 not responding Message-ID: Chamber only pumped down to ~22 mT. Added oil to the pump. Now pressure goes to < 10 mT. Ran )2 plasma with no problems. From eenriquez at snf.stanford.edu Tue Oct 20 14:51:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Oct 2009 14:51:26 -0700 Subject: Problem drytek4 SNF 2009-10-19 14:21:02: cycling not working? Message-ID: Chamber only pumped down to ~22 mT. Added oil to the pump. Now pressure goes to < 10 mT. Ran )2 plasma with no problems.