Shutdown drytek4 SNF 2009-10-19 15:28:12: Drytek4 not responding

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 20 14:51:21 PDT 2009


Chamber only pumped down to ~22 mT.  Added oil to the pump.  Now pressure goes to < 10 mT.  Ran )2 plasma with no problems.




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