Shutdown drytek4 SNF 2009-10-19 15:28:12: Drytek4 not responding
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Oct 20 14:51:21 PDT 2009
Chamber only pumped down to ~22 mT. Added oil to the pump. Now pressure goes to < 10 mT. Ran )2 plasma with no problems.
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