From cbaxter at snf.stanford.edu Thu Sep 3 23:27:14 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 3 Sep 2009 23:27:14 -0700 Subject: Problem drytek4 SNF 2009-08-31 18:39:14: plasma is not stable Message-ID: Run 100sccm of sf6 and 50sccm of o2 with pressure set at 150mt and rf power at 100watts was able tuned with 0 reflective. From mislam at snf.stanford.edu Sat Sep 5 16:52:39 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 5 Sep 2009 16:52:39 -0700 Subject: Problem drytek4 SNF 2009-09-05 16:52:38: Won't tune Message-ID: Refelected power stays high From mrlin at snf.stanford.edu Tue Sep 15 18:30:47 2009 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Tue, 15 Sep 2009 18:30:47 -0700 Subject: Problem drytek4 SNF 2009-09-15 18:30:45: timer stuck Message-ID: The tens digit in Timer 1 is stuck at "1". From chingmei at snf.stanford.edu Fri Sep 18 10:34:01 2009 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Fri, 18 Sep 2009 10:34:01 -0700 Subject: Problem drytek4 SNF 2009-09-18 10:34:00: CHF3 maximal flow rate Message-ID: CHF3 maximal flow rate was around 80sccm and kept decreasing From xhlim at snf.stanford.edu Sat Sep 19 16:25:17 2009 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Sat, 19 Sep 2009 16:25:17 -0700 Subject: Comment drytek4 SNF 2009-09-19 16:25:17: chf3 out ? 0 flow... Message-ID: From eenriquez at snf.stanford.edu Tue Sep 22 07:51:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Sep 2009 07:51:39 -0700 Subject: Comment drytek4 SNF 2009-09-22 07:51:39: CHF3 is unavailable Message-ID: A new gas cylinder should be here by Friday. From eenriquez at snf.stanford.edu Wed Sep 23 16:43:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:43:30 -0700 Subject: Problem drytek4 SNF 2009-09-23 16:43:29: Needs a a process qual Message-ID: We are using a new CHF3 vendor. Need to run a qual to verify the etch rates. From eenriquez at snf.stanford.edu Wed Sep 23 16:44:08 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:44:08 -0700 Subject: Comment drytek4 SNF 2009-09-19 16:25:17: chf3 out ? 0 flow... Message-ID: Installed new CHF3 gas cylinder. Ran process 3 with no problems. From eenriquez at snf.stanford.edu Wed Sep 23 16:44:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:44:17 -0700 Subject: Comment drytek4 SNF 2009-09-22 07:51:39: CHF3 is unavailable Message-ID: Installed new CHF3 gas cylinder. Ran process 3 with no problems. From eenriquez at snf.stanford.edu Wed Sep 23 16:44:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:44:23 -0700 Subject: Problem drytek4 SNF 2009-09-18 10:34:00: CHF3 maximal flow rate Message-ID: Installed new CHF3 gas cylinder. Ran process 3 with no problems. From khoang at snf.stanford.edu Thu Sep 24 12:06:38 2009 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Thu, 24 Sep 2009 12:06:38 -0700 Subject: Comment drytek4 SNF 2009-09-24 12:06:38: RF power supply breaker in up (=on) position Message-ID: some body left the RF power supply breaker on! From cbaxter at snf.stanford.edu Tue Sep 29 21:48:44 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 Sep 2009 21:48:44 -0700 Subject: Problem drytek4 SNF 2009-09-15 18:30:45: timer stuck Message-ID: Reset system. From cbaxter at snf.stanford.edu Tue Sep 29 21:49:24 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 Sep 2009 21:49:24 -0700 Subject: Problem drytek4 SNF 2009-09-05 16:52:38: Won't tune Message-ID: Was able to tuned with sf6 and o2 gases..