Problem drytek4 SNF 2009-08-31 18:39:14: plasma is not stable

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Sep 3 23:27:14 PDT 2009


Run 100sccm of sf6 and 50sccm of o2 with pressure set
at 150mt and  rf power at 100watts was able tuned with 0 reflective.




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