Problem drytek4 SNF 2010-08-14 10:48:06: leak to pressure gauge?

jparker at snf.stanford.edu jparker at snf.stanford.edu
Sat Aug 14 10:48:07 PDT 2010


Pressure gauge reading drifts up at 100s of mtorr/sec after a process is done as you're waiting to change wafers. It does not seem to stop. It is fine during a process, though, and seemed to be fine when I took it out of standby. Caveat: I have not used drytek4 in a while and this may be normal behavior.




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