Shutdown drytek4 SNF 2010-08-20 17:34:27: no plasma

bryane at snf.stanford.edu bryane at snf.stanford.edu
Fri Aug 20 17:34:28 PDT 2010


The system worked fine for a few etches, then suddenly the reflected power jumped up, and I could no longer get a plasma.  Tuning the coil and capacitor doesn't seem to have any effect on the reflected power.  Sorry to shut down the system right before the weekend.




More information about the drytek4-pcs mailing list