Problem drytek4 SNF 2010-02-02 12:00:30: No glow in chamber

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Feb 2 13:17:53 PST 2010


Setup Drytek 4 with process 1, using 100 watts less than 5 watts for
reflective power  with 100/ 150 mTorr. OK!
As I take pressure higher (200mT) The plasma is harder to see.
Same when using lower power (65 W) I ran a 25 minute clean cycle
and there is a plasma with all powers and pressures I tried.




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