From eenriquez at snf.stanford.edu  Mon Jan  4 14:59:15 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 4 Jan 2010 14:59:15 -0800
Subject: Comment drytek4 SNF 2009-12-15 13:07:03: Top Electrode
Message-ID: <mailman.693.1357938329.25694.drytek4-pcs@snf.stanford.edu>

Cleaned top electrode



From eenriquez at snf.stanford.edu  Mon Jan  4 15:01:53 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 4 Jan 2010 15:01:53 -0800
Subject: Comment drytek4 SNF 2010-01-04 15:01:53: Test OK
Message-ID: <mailman.694.1357938329.25694.drytek4-pcs@snf.stanford.edu>

Ran a recipe with no problems.



From fmadriz at snf.stanford.edu  Wed Jan 13 13:13:07 2010
From: fmadriz at snf.stanford.edu (fmadriz at snf.stanford.edu)
Date: Wed, 13 Jan 2010 13:13:07 -0800
Subject: Problem drytek4 SNF 2010-01-13 13:13:06: Pressure after shutdown
Message-ID: <mailman.695.1357938329.25694.drytek4-pcs@snf.stanford.edu>

	
After pressing CYCLE START the pressure does not reach 200 - 400 mT. Instead it keeps increasing



From eenriquez at snf.stanford.edu  Thu Jan 14 10:01:55 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 14 Jan 2010 10:01:55 -0800
Subject: Problem drytek4 SNF 2010-01-13 13:13:06: Pressure after shutdown
Message-ID: <mailman.696.1357938329.25694.drytek4-pcs@snf.stanford.edu>

Adjusted the purge valve.



From jperez at snf.stanford.edu  Tue Jan 19 11:31:05 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 19 Jan 2010 11:31:05 -0800
Subject: Comment drytek4 SNF 2009-11-11 10:27:40: Completed monthly pm
Message-ID: <mailman.697.1357938329.25694.drytek4-pcs@snf.stanford.edu>

Thanks!



From jperez at snf.stanford.edu  Tue Jan 19 11:31:35 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 19 Jan 2010 11:31:35 -0800
Subject: Comment drytek4 SNF 2010-01-04 15:01:53: Test OK
Message-ID: <mailman.698.1357938329.25694.drytek4-pcs@snf.stanford.edu>

Drytek 4 checks out after power failure 1/19/10



From yiyang at snf.stanford.edu  Sat Jan 30 18:53:29 2010
From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu)
Date: Sat, 30 Jan 2010 18:53:29 -0800
Subject: Problem drytek4 SNF 2010-01-30 18:53:28: water level is low
Message-ID: <mailman.699.1357938329.25694.drytek4-pcs@snf.stanford.edu>

water for lower chuck is near 0



From cbaxter at snf.stanford.edu  Sun Jan 31 18:51:51 2010
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sun, 31 Jan 2010 18:51:51 -0800
Subject: Problem drytek4 SNF 2010-01-30 18:53:28: water level is low
Message-ID: <mailman.700.1357938329.25694.drytek4-pcs@snf.stanford.edu>

Flushed lower cooling water..