From altamash at snf.stanford.edu  Sat Jul 10 15:46:20 2010
From: altamash at snf.stanford.edu (altamash at snf.stanford.edu)
Date: Sat, 10 Jul 2010 15:46:20 -0700
Subject: Comment drytek4 SNF 2010-07-10 15:46:19: standby button light not working
Message-ID: <mailman.739.1357938329.25694.drytek4-pcs@snf.stanford.edu>




From ehe at snf.stanford.edu  Tue Jul 13 19:54:08 2010
From: ehe at snf.stanford.edu (ehe at snf.stanford.edu)
Date: Tue, 13 Jul 2010 19:54:08 -0700
Subject: Problem drytek4 SNF 2010-07-13 19:54:07: green standby LED out
Message-ID: <mailman.740.1357938329.25694.drytek4-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Jul 14 08:42:12 2010
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 14 Jul 2010 08:42:12 -0700
Subject: Problem drytek4 SNF 2010-07-13 19:54:07: green standby LED out
Message-ID: <mailman.741.1357938329.25694.drytek4-pcs@snf.stanford.edu>

Changed bulb...



From liangjl at snf.stanford.edu  Wed Jul 14 23:04:16 2010
From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu)
Date: Wed, 14 Jul 2010 23:04:16 -0700
Subject: Problem drytek4 SNF 2010-07-14 23:04:16: Reflective power fluctuating
Message-ID: <mailman.742.1357938329.25694.drytek4-pcs@snf.stanford.edu>

Plasma flicking, reflective power fluctuate a lot. Using process #1 O2 cleaning  at 30W.



From jperez at snf.stanford.edu  Thu Jul 15 09:34:15 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 15 Jul 2010 09:34:15 -0700
Subject: Comment drytek4 SNF 2010-07-10 15:46:19: standby button light not working
Message-ID: <mailman.743.1357938329.25694.drytek4-pcs@snf.stanford.edu>

bulb has been replaced.



From jperez at snf.stanford.edu  Thu Jul 15 09:49:13 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 15 Jul 2010 09:49:13 -0700
Subject: Problem drytek4 SNF 2010-07-14 23:04:16: Reflective power fluctuating
Message-ID: <mailman.744.1357938329.25694.drytek4-pcs@snf.stanford.edu>

I used process 1, 150 mTorr, 100% O2, got as low as 25 watts, 
reflective power at zero,  without
 flickering.  It took quite awhile to tune wtih the help of Elmer (15min).



From faridz at snf.stanford.edu  Thu Jul 22 10:42:55 2010
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Thu, 22 Jul 2010 10:42:55 -0700
Subject: Shutdown drytek4 SNF 2010-07-22 10:42:54: RF power not stabalizing.... 
Message-ID: <mailman.745.1357938329.25694.drytek4-pcs@snf.stanford.edu>

please check



From mcvittie at snf.stanford.edu  Thu Jul 22 14:07:00 2010
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Thu, 22 Jul 2010 14:07:00 -0700
Subject: Shutdown drytek4 SNF 2010-07-22 10:42:54: RF power not stabalizing.... 
Message-ID: <mailman.746.1357938329.25694.drytek4-pcs@snf.stanford.edu>

No problem found. I appears that the user needs to learn how to work with the matching network.  Jim 



From eenriquez at snf.stanford.edu  Thu Jul 29 11:36:46 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 29 Jul 2010 11:36:46 -0700
Subject: Comment drytek4 SNF 2010-07-29 11:36:46: Tested OK after power outtage
Message-ID: <mailman.747.1357938329.25694.drytek4-pcs@snf.stanford.edu>




From altamash at snf.stanford.edu  Thu Jul 29 12:33:44 2010
From: altamash at snf.stanford.edu (altamash at snf.stanford.edu)
Date: Thu, 29 Jul 2010 12:33:44 -0700
Subject: Comment drytek4 SNF 2010-07-29 12:33:43: the chamber lid is not opening/closing smoothly
Message-ID: <mailman.748.1357938329.25694.drytek4-pcs@snf.stanford.edu>