Problem drytek4 SNF 2010-07-14 23:04:16: Reflective power fluctuating
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Thu Jul 15 09:49:13 PDT 2010
I used process 1, 150 mTorr, 100% O2, got as low as 25 watts,
reflective power at zero, without
flickering. It took quite awhile to tune wtih the help of Elmer (15min).
More information about the drytek4-pcs
mailing list