Problem drytek4 SNF 2010-07-14 23:04:16: Reflective power fluctuating

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jul 15 09:49:13 PDT 2010


I used process 1, 150 mTorr, 100% O2, got as low as 25 watts, 
reflective power at zero,  without
 flickering.  It took quite awhile to tune wtih the help of Elmer (15min).




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