From jperez at snf.stanford.edu Thu Jun 3 09:23:48 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 Jun 2010 09:23:48 -0700 Subject: Problem drytek4 SNF 2010-06-03 09:23:47: Couldn't get gas flow to register! Message-ID: From jperez at snf.stanford.edu Thu Jun 3 09:29:54 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 Jun 2010 09:29:54 -0700 Subject: Problem drytek4 SNF 2010-06-03 09:23:47: Couldn't get gas flow to register! Message-ID: Some User is switching toggles off, PLEASE STOP! The front panel is set up for any qualified User to use the system. When toggles get switched around the next User may not know what is wrong and waste our maintenance's andUser's valuable time. From jperez at snf.stanford.edu Thu Jun 3 10:03:55 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 Jun 2010 10:03:55 -0700 Subject: Comment drytek4 SNF 2010-05-21 13:13:58: CHF3 and Presure Fluctuations Message-ID: I ran a 30 min O2 clean and everyone should be running a clean after using SF6 or CHF3. I used process 2 and set parameters with 100 mT, 100 watts, CHF3 at 100% flow and O2 at 50% flow. Seem to be stable. I am having a hard time tuning reflective power with >100 watts on all three processes buttons. From xhlim at snf.stanford.edu Thu Jun 3 16:02:18 2010 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Thu, 3 Jun 2010 16:02:18 -0700 Subject: Problem drytek4 SNF 2010-06-03 16:02:17: Light for Process Button 2 is out Message-ID: Does not light up when pressed anymore. From cbaxter at snf.stanford.edu Sat Jun 5 00:28:10 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 00:28:10 -0700 Subject: Problem drytek4 SNF 2010-06-03 16:02:17: Light for Process Button 2 is out Message-ID: Changed bulb.. From jperez at snf.stanford.edu Mon Jun 7 07:09:52 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jun 2010 07:09:52 -0700 Subject: Shutdown drytek4 SNF 2010-06-07 07:09:51: Water flow will be shut down from 7 AM until 2 PM Message-ID: From jperez at snf.stanford.edu Mon Jun 7 09:58:51 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jun 2010 09:58:51 -0700 Subject: Shutdown drytek4 SNF 2010-06-07 07:09:51: Water flow will be shut down from 7 AM until 2 PM Message-ID: Water flow back on. From jperez at snf.stanford.edu Fri Jun 25 09:53:57 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 Jun 2010 09:53:57 -0700 Subject: Problem drytek4 SNF 2010-06-25 09:53:57: Process 1 wouldn't tune. Message-ID: From cbaxter at snf.stanford.edu Mon Jun 28 08:36:58 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Jun 2010 08:36:58 -0700 Subject: Problem drytek4 SNF 2010-06-25 09:53:57: Process 1 wouldn't tune. Message-ID: Manually tuned using process 1 w/out problem