Comment drytek4 SNF 2010-05-21 13:13:58: CHF3 and Presure Fluctuations

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jun 3 10:03:55 PDT 2010


I ran a 30 min O2 clean and everyone should be running a clean after 
using SF6 or CHF3. I used process 2 and set parameters with 
100 mT, 100 watts, CHF3 at 100% flow and O2 at 50% flow.
Seem to be stable. I am having a hard time tuning reflective power with
>100 watts on all three processes buttons.




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