From cbaxter at snf.stanford.edu Sun May 2 06:59:05 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 2 May 2010 06:59:05 -0700 Subject: Problem drytek4 SNF 2010-04-29 09:43:15: All 3 capacitor Pots are at there MAX Message-ID: Was able to tune with o2 to zeo watts w/out problem. From sqliu at snf.stanford.edu Mon May 3 09:41:30 2010 From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu) Date: Mon, 3 May 2010 09:41:30 -0700 Subject: Problem drytek4 SNF 2010-05-03 09:41:29: cooling low Message-ID: one of the cooling marks was slightly below minimum at the at the end of my session From eenriquez at snf.stanford.edu Thu May 6 11:00:27 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 May 2010 11:00:27 -0700 Subject: Problem drytek4 SNF 2010-05-03 09:41:29: cooling low Message-ID: Adjusted the chamber cooling water flow. From altamash at snf.stanford.edu Sat May 8 18:39:46 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 8 May 2010 18:39:46 -0700 Subject: Problem drytek4 SNF 2010-05-08 18:39:45: Machine stuck in standby! Message-ID: From altamash at snf.stanford.edu Sat May 8 19:22:30 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 8 May 2010 19:22:30 -0700 Subject: Problem drytek4 SNF 2010-05-08 19:22:30: System working fine now Message-ID: From jperez at snf.stanford.edu Mon May 10 07:39:17 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 May 2010 07:39:17 -0700 Subject: Problem drytek4 SNF 2010-05-08 19:22:30: System working fine now Message-ID: Not mentioned what the fix was, but I would guess he remembered to enable the system. From jperez at snf.stanford.edu Mon May 10 07:39:33 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 May 2010 07:39:33 -0700 Subject: Problem drytek4 SNF 2010-05-08 18:39:45: Machine stuck in standby! Message-ID: Was it enabled? From tdo at snf.stanford.edu Fri May 14 20:22:21 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Fri, 14 May 2010 20:22:21 -0700 Subject: Problem drytek4 SNF 2010-05-14 20:22:20: standby light (burnt?) out Message-ID: but does go into standby From tdo at snf.stanford.edu Fri May 14 20:22:56 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Fri, 14 May 2010 20:22:56 -0700 Subject: Problem drytek4 SNF 2010-05-14 20:22:55: O2 valve takes more than 1 full turn Message-ID: O2 valve seems to take more than 1 full turn to get O2 flowing (we are trained that more than one full turn may damage the valve) From cbaxter at snf.stanford.edu Sun May 16 22:35:31 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 16 May 2010 22:35:31 -0700 Subject: Problem drytek4 SNF 2010-05-14 20:22:55: O2 valve takes more than 1 full turn Message-ID: From cbaxter at snf.stanford.edu Sun May 16 22:35:45 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 16 May 2010 22:35:45 -0700 Subject: Problem drytek4 SNF 2010-05-14 20:22:20: standby light (burnt?) out Message-ID: From faridz at snf.stanford.edu Thu May 20 12:12:33 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 20 May 2010 12:12:33 -0700 Subject: Problem drytek4 SNF 2010-05-20 12:12:33: No Freon22 flow Message-ID: no Freon 22 flowing at dry run please check if we are out of Freon 22 ? From faridz at snf.stanford.edu Thu May 20 12:13:51 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 20 May 2010 12:13:51 -0700 Subject: Problem drytek4 SNF 2010-05-20 12:13:50: sorry its Freon 23 ! Message-ID: From eenriquez at snf.stanford.edu Thu May 20 12:40:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 May 2010 12:40:09 -0700 Subject: Problem drytek4 SNF 2010-05-20 12:13:50: sorry its Freon 23 ! Message-ID: Turned on the gas flow controller switch. From eenriquez at snf.stanford.edu Thu May 20 12:40:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 May 2010 12:40:17 -0700 Subject: Problem drytek4 SNF 2010-05-20 12:12:33: No Freon22 flow Message-ID: Turned on the gas flow controller switch. From faridz at snf.stanford.edu Thu May 20 14:59:56 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 20 May 2010 14:59:56 -0700 Subject: Shutdown drytek4 SNF 2010-05-20 14:59:56: RF power fluctuating alot Message-ID: RF Foward power keep fluctuationg causing me eatch rate change drasticly. Please check i also noticed that CHF3 and presure aslo shifting during etch process. From faridz at snf.stanford.edu Thu May 20 15:09:40 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 20 May 2010 15:09:40 -0700 Subject: Problem drytek4 SNF 2010-05-20 15:09:39: reflective power keep fluctuating !!!! Message-ID: From faridz at snf.stanford.edu Fri May 21 13:13:58 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 21 May 2010 13:13:58 -0700 Subject: Comment drytek4 SNF 2010-05-21 13:13:58: CHF3 and Presure Fluctuations Message-ID: Elmer, Please check this tool, RF Power is seems to be stable but CHF3 and Presure keep fluctuating alot. I also see lots of flakes droping into wafers. Etch rate also not stable. From eenriquez at snf.stanford.edu Fri May 21 15:22:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 May 2010 15:22:31 -0700 Subject: Problem drytek4 SNF 2010-05-20 15:09:39: reflective power keep fluctuating !!!! Message-ID: Tuned matching network. Tested recipes 1, 2 and 3. From eenriquez at snf.stanford.edu Fri May 21 15:22:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 May 2010 15:22:58 -0700 Subject: Shutdown drytek4 SNF 2010-05-20 14:59:56: RF power fluctuating alot Message-ID: Tuned matching network. Tested recipes 1,2 and 3.