Problem drytek4 SNF 2010-05-20 12:13:50: sorry its Freon 23 !
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu May 20 12:40:09 PDT 2010
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Problem drytek4 SNF 2010-05-20 12:13:50: sorry its Freon 23 !
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Shutdown drytek4 SNF 2010-05-20 14:59:56: RF power fluctuating alot
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Turned on the gas flow controller switch.
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Problem drytek4 SNF 2010-05-20 12:13:50: sorry its Freon 23 !
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Shutdown drytek4 SNF 2010-05-20 14:59:56: RF power fluctuating alot
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