Shutdown drytek4 SNF 2010-05-20 14:59:56: RF power fluctuating alot

faridz at snf.stanford.edu faridz at snf.stanford.edu
Thu May 20 14:59:56 PDT 2010


RF Foward power keep fluctuationg causing me eatch rate change drasticly. Please check i also noticed that CHF3 and presure aslo shifting during etch process. 




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