Comment drytek4 SNF 2010-05-21 13:13:58: CHF3 and Presure Fluctuations

faridz at faridz at
Fri May 21 13:13:58 PDT 2010

Elmer, Please check this tool, RF Power is seems to be stable but CHF3 and Presure keep fluctuating alot. I also see lots of flakes droping into wafers. Etch rate also not stable. 

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