Comment drytek4 SNF 2010-05-21 13:13:58: CHF3 and Presure Fluctuations

faridz at snf.stanford.edu faridz at snf.stanford.edu
Fri May 21 13:13:58 PDT 2010


Elmer, Please check this tool, RF Power is seems to be stable but CHF3 and Presure keep fluctuating alot. I also see lots of flakes droping into wafers. Etch rate also not stable. 




More information about the drytek4-pcs mailing list