From eenriquez at snf.stanford.edu Thu Dec 1 12:07:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:07:14 -0800 Subject: Problem drytek4 SNF 2011-07-13 16:03:40: Standby is intermittent. Message-ID: This problem has been resolved. From eenriquez at snf.stanford.edu Thu Dec 1 12:11:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 12:11:57 -0800 Subject: Problem drytek4 SNF 2011-10-25 10:11:40: The Cycle Hold button isn't working Message-ID: The cycle hold button when pressed before the cycle start button is pushed will delay starting the process until it is release. When the cycle hold button however is pushed during the process will terminate the process. From trejo10 at snf.stanford.edu Sun Dec 11 12:49:28 2011 From: trejo10 at snf.stanford.edu (trejo10 at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:49:28 -0800 Subject: Comment drytek4 SNF 2011-12-11 12:49:27: Purging Message-ID: The timer for the purging did not start. Pressed cycle stop and that did not vent the machine. From trejo10 at snf.stanford.edu Sun Dec 11 12:50:09 2011 From: trejo10 at snf.stanford.edu (trejo10 at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:50:09 -0800 Subject: Problem drytek4 SNF 2011-12-11 12:50:09: Purging Step Message-ID: Time for purging step did not start. I pressed the Clear Wafer button but that did not vent the system. From luckys at snf.stanford.edu Sun Dec 11 15:27:14 2011 From: luckys at snf.stanford.edu (luckys at snf.stanford.edu) Date: Sun, 11 Dec 2011 15:27:14 -0800 Subject: Problem drytek4 SNF 2011-12-11 15:27:14: Drytek-4 does not work! Message-ID: I tried to run Oxygen plasma etch but the process does not start after press cycle start. No pressure change, no count down, no power increase.... nothing. In addition the systen does not vent with clear wafer button either. From maxms at snf.stanford.edu Sun Dec 11 15:42:33 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 11 Dec 2011 15:42:33 -0800 Subject: Problem drytek4 SNF 2011-12-11 15:42:32: not working Message-ID: It pumps down, but never starts running... From jperez at snf.stanford.edu Mon Dec 12 07:32:52 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Dec 2011 07:32:52 -0800 Subject: Shutdown drytek4 SNF 2011-12-12 07:32:51: Users not able to process Message-ID: From eenriquez at snf.stanford.edu Mon Dec 12 09:58:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 09:58:25 -0800 Subject: Shutdown drytek4 SNF 2011-12-12 07:32:51: Users not able to process Message-ID: Unstuck water flow interlock switch. From eenriquez at snf.stanford.edu Mon Dec 12 09:58:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 09:58:46 -0800 Subject: Problem drytek4 SNF 2011-12-11 15:42:32: not working Message-ID: Unstuck water flow interlock switch. Ran O2 plasma. From eenriquez at snf.stanford.edu Mon Dec 12 09:58:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 09:58:51 -0800 Subject: Problem drytek4 SNF 2011-12-11 15:27:14: Drytek-4 does not work! Message-ID: Unstuck water flow interlock switch. Ran O2 plasma. From eenriquez at snf.stanford.edu Mon Dec 12 10:41:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 10:41:57 -0800 Subject: Problem drytek4 SNF 2011-12-11 12:50:09: Purging Step Message-ID: no problem found From eenriquez at snf.stanford.edu Wed Dec 14 14:10:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Dec 2011 14:10:14 -0800 Subject: Shutdown drytek4 SNF 2011-12-14 14:10:14: scheduled shutdown Message-ID: