Problem drytek4 SNF 2011-12-11 15:27:14: Drytek-4 does not work!

luckys at snf.stanford.edu luckys at snf.stanford.edu
Sun Dec 11 15:27:14 PST 2011


I tried to run Oxygen plasma etch but the process does not start after press cycle start. No pressure change, no count down, no power increase.... nothing.
In addition the systen does not vent with clear wafer button either.




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