From eenriquez at snf.stanford.edu Fri Jul 1 08:03:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Jul 2011 08:03:14 -0700 Subject: Comment drytek4 SNF 2011-06-27 15:01:50: Update Message-ID: Archived From paik at snf.stanford.edu Fri Jul 1 13:03:45 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Fri, 1 Jul 2011 13:03:45 -0700 Subject: Problem drytek4 SNF 2011-07-01 13:03:44: System won't enter standby mode Message-ID: after processing the system won't start pumpdown for standby mode. regular process runs seem fine. From ehe at snf.stanford.edu Sun Jul 3 12:58:17 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 3 Jul 2011 12:58:17 -0700 Subject: Problem drytek4 SNF 2011-07-03 12:58:16: timer doesn't work Message-ID: Don't rely on the timer! Time passes the set time even after micro reset. From cbaxter at snf.stanford.edu Tue Jul 5 08:27:42 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Jul 2011 08:27:42 -0700 Subject: Problem drytek4 SNF 2011-07-01 13:03:44: System won't enter standby mode Message-ID: Reset system and put it at stand by.. From cbaxter at snf.stanford.edu Tue Jul 5 09:20:33 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Jul 2011 09:20:33 -0700 Subject: Problem drytek4 SNF 2011-07-03 12:58:16: timer doesn't work Message-ID: Reset controller.. From cbaxter at snf.stanford.edu Tue Jul 5 09:20:53 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Jul 2011 09:20:53 -0700 Subject: Comment drytek4 SNF 2011-06-26 14:38:06: shutdown due to same problem as on 6/23 Message-ID: From cbaxter at snf.stanford.edu Tue Jul 5 09:21:21 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Jul 2011 09:21:21 -0700 Subject: Problem drytek4 SNF 2011-06-24 16:07:35: couldn't run process 1 or 2 Message-ID: From cbaxter at snf.stanford.edu Tue Jul 5 09:22:29 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Jul 2011 09:22:29 -0700 Subject: Problem drytek4 SNF 2011-07-05 09:22:28: Bad cycle switch Message-ID: Looking for a cycle replacement From paik at snf.stanford.edu Tue Jul 5 16:46:37 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Tue, 5 Jul 2011 16:46:37 -0700 Subject: Problem drytek4 SNF 2011-07-05 16:46:36: process wont terminate on timer Message-ID: the process won't terminate on its own using the timer. used micro-reset. From altamash at snf.stanford.edu Tue Jul 5 19:00:55 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Tue, 5 Jul 2011 19:00:55 -0700 Subject: Problem drytek4 SNF 2011-07-05 19:00:54: Not seeing same conditions Message-ID: I ran the same recipe for O2 clean that I run frequently but the plasma looks much brighter today adn the voltage value is also off by aboutn 20%. its usually at 2.7v but today its at 2.2V. I am not sure what the reason is? From altamash at snf.stanford.edu Tue Jul 5 19:01:26 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Tue, 5 Jul 2011 19:01:26 -0700 Subject: Problem drytek4 SNF 2011-07-05 19:01:25: Timer does not work for Process 1 Message-ID: Have to hit the blue reset button to stop the etching. From ehe at snf.stanford.edu Wed Jul 6 13:06:03 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 6 Jul 2011 13:06:03 -0700 Subject: Problem drytek4 SNF 2011-07-06 13:06:03: timers and chf3 gas Message-ID: Timer does not work on every run. CHF3 gas stopped flowing after 2 runs. Is SNF out of gas or is this another drytek logic problem? From ehe at snf.stanford.edu Wed Jul 6 16:32:57 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 6 Jul 2011 16:32:57 -0700 Subject: Comment drytek4 SNF 2011-07-06 16:32:56: chf3 is flowing again... Message-ID: be very careful using drytek4... sometimes gas cuts out for no apparent reason... timer works 1/4 of the time... needs to be babysat From cbaxter at snf.stanford.edu Thu Jul 7 09:08:07 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:08:07 -0700 Subject: Problem drytek4 SNF 2011-07-06 13:06:03: timers and chf3 gas Message-ID: From cbaxter at snf.stanford.edu Thu Jul 7 09:08:27 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:08:27 -0700 Subject: Problem drytek4 SNF 2011-07-05 16:46:36: process wont terminate on timer Message-ID: From cbaxter at snf.stanford.edu Thu Jul 7 09:08:40 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:08:40 -0700 Subject: Problem drytek4 SNF 2011-07-05 19:00:54: Not seeing same conditions Message-ID: From cbaxter at snf.stanford.edu Thu Jul 7 09:19:40 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:19:40 -0700 Subject: Comment drytek4 SNF 2011-07-07 09:19:39: Timer problem Message-ID: Power off and on the system, I'm currently cycling the tool using all three recipes.. From jperez at snf.stanford.edu Thu Jul 7 11:26:52 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Jul 2011 11:26:52 -0700 Subject: Problem drytek4 SNF 2011-07-05 19:01:25: Timer does not work for Process 1 Message-ID: The timers worked. What Users are saying is that when the clock display has the wrong number showing the timers or gas flows will not work. If I select process #2 you should see #2 show on the dis- play. When I started the process it showed $3, but within five second the display switched to #2 and timer worked. I was even able to move time from 20 minutes and when purge was done I manually switched timer to 8 minutes (before timer hit eight minutes and it still worked. If you see the wrong number(s) (give the display five seconds to switch) at this time you'll need to use the blue microprocess reset buttom. For safety reasons (not to misprocress your sample(s)) Users have turned RF powers to zero even if they haven't pressed the other process buttons. hope this helps until another switch can be located. From jperez at snf.stanford.edu Thu Jul 7 11:30:56 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Jul 2011 11:30:56 -0700 Subject: Comment drytek4 SNF 2011-07-06 16:32:56: chf3 is flowing again... Message-ID: Need to watch for the correct process time display number. This display number will tell you if you selected process 1,2, or 3. If the wrong number is shown (when the actual process has started processing) You'll need to press the blue micro process reset button to reset everything. From jperez at snf.stanford.edu Mon Jul 11 10:34:04 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 11 Jul 2011 10:34:04 -0700 Subject: Problem drytek4 SNF 2011-07-11 10:34:04: stand-by light stuck (light on) but won't go into stand-by Message-ID: From jperez at snf.stanford.edu Mon Jul 11 10:37:46 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 11 Jul 2011 10:37:46 -0700 Subject: Problem drytek4 SNF 2011-07-11 10:37:46: Could not get processes 2,3 to work Message-ID: Process 3, clock won't work, Process 2 , plasma flickering and reflective high. I couldn't get it below 5 watts. Process 1 worked, but would go into stand-by mode pressing start or micro reset. From paik at snf.stanford.edu Mon Jul 11 12:03:37 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Mon, 11 Jul 2011 12:03:37 -0700 Subject: Problem drytek4 SNF 2011-07-11 12:03:37: standby button jammed Message-ID: could not start process as the standby green button is jammed in and could not turn it off. From ehe at snf.stanford.edu Mon Jul 11 17:49:12 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 11 Jul 2011 17:49:12 -0700 Subject: Shutdown drytek4 SNF 2011-07-11 17:49:11: please fix standby button Message-ID: Standby button casing is loose and button is jammed on - can't run drytek. From eenriquez at snf.stanford.edu Tue Jul 12 14:56:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Jul 2011 14:56:01 -0700 Subject: Shutdown drytek4 SNF 2011-07-12 14:56:00: Logic problem Message-ID: From eenriquez at snf.stanford.edu Wed Jul 13 15:52:00 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:52:00 -0700 Subject: Comment drytek4 SNF 2011-06-09 13:14:29: Update "won't go into Standby" Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 13 15:52:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:52:20 -0700 Subject: Comment drytek4 SNF 2011-06-13 14:02:40: Seems OK, but: Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 13 15:53:00 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:53:00 -0700 Subject: Problem drytek4 SNF 2011-07-05 09:22:28: Bad cycle switch Message-ID: Resoldered all cycle switch connections. From eenriquez at snf.stanford.edu Wed Jul 13 15:53:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:53:30 -0700 Subject: Problem drytek4 SNF 2011-07-11 10:34:04: stand-by light stuck (light on) but won't go into stand-by Message-ID: Repaired standby switch. From eenriquez at snf.stanford.edu Wed Jul 13 15:56:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:56:37 -0700 Subject: Problem drytek4 SNF 2011-07-11 10:37:46: Could not get processes 2,3 to work Message-ID: All process timer works after replacing a bad programable peripheral interface chip in the process controller. Also, resoldered all connections to the process and standby buttons. From eenriquez at snf.stanford.edu Wed Jul 13 15:56:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:56:52 -0700 Subject: Shutdown drytek4 SNF 2011-07-11 17:49:11: please fix standby button Message-ID: Repaired the standby button. From eenriquez at snf.stanford.edu Wed Jul 13 15:57:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:57:12 -0700 Subject: Problem drytek4 SNF 2011-07-11 12:03:37: standby button jammed Message-ID: Repaired standby button. From eenriquez at snf.stanford.edu Wed Jul 13 15:57:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:57:20 -0700 Subject: Shutdown drytek4 SNF 2011-07-12 14:56:00: Logic problem Message-ID: All process timer works after replacing a bad programable peripheral interface chip in the process controller. Also, resoldered all connections to the process and standby buttons. From eenriquez at snf.stanford.edu Wed Jul 13 15:57:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:57:28 -0700 Subject: Comment drytek4 SNF 2011-07-07 09:19:39: Timer problem Message-ID: All process timer works after replacing a bad programable peripheral interface chip in the process controller. Also, resoldered all connections to the process and standby buttons. From eenriquez at snf.stanford.edu Wed Jul 13 16:03:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jul 2011 16:03:40 -0700 Subject: Problem drytek4 SNF 2011-07-13 16:03:40: Standby is intermittent. Message-ID: Need to press the "Cycle Start" button several times to initiate the Standby mode. Wait about 10 seconds in between "Cycle Start" presses. It takes anywhere from 1 to 10 presses of the button to start the Standby pump down. From jperez at snf.stanford.edu Tue Jul 19 09:58:43 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 Jul 2011 09:58:43 -0700 Subject: Shutdown drytek4 SNF 2011-07-19 09:58:43: Start button not responding Message-ID: Couldn't get process to start. From cbaxter at snf.stanford.edu Tue Jul 19 11:58:00 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 19 Jul 2011 11:58:00 -0700 Subject: Shutdown drytek4 SNF 2011-07-19 09:58:43: Start button not responding Message-ID: reseated the i/o pcb and put system on stand by mode From ehe at snf.stanford.edu Tue Jul 19 15:16:35 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 19 Jul 2011 15:16:35 -0700 Subject: Shutdown drytek4 SNF 2011-07-19 15:16:34: cycle start button not effective Message-ID: Pressing cycle start (after many different combinations of things) does not lead to process starting... pressure screen goes blank; cannot use. From eenriquez at snf.stanford.edu Wed Jul 20 09:38:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jul 2011 09:38:01 -0700 Subject: Shutdown drytek4 SNF 2011-07-19 15:16:34: cycle start button not effective Message-ID: Replaced another programmable peripheral interface chip. From ehe at snf.stanford.edu Wed Jul 20 13:12:19 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 20 Jul 2011 13:12:19 -0700 Subject: Problem drytek4 SNF 2011-07-20 13:12:18: can't tune power in process 3 Message-ID: RF power was on, but was unaffected RF tuning dials for process 3 (process 2 was ok) From paik at snf.stanford.edu Thu Jul 21 15:38:21 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Thu, 21 Jul 2011 15:38:21 -0700 Subject: Problem drytek4 SNF 2011-07-21 15:38:21: wont enter standby Message-ID: when I arrived it was not in standby mode (green button was lit but the system was not pumped down) and I could not enter standby mode once I finished my process. the system will not initiate pumpdown after the standby button is lit and start button is pressed. From eenriquez at snf.stanford.edu Mon Jul 25 10:03:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Jul 2011 10:03:12 -0700 Subject: Problem drytek4 SNF 2011-07-21 15:38:21: wont enter standby Message-ID: Placed system on Standby From popomoo at snf.stanford.edu Tue Jul 26 21:14:56 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Tue, 26 Jul 2011 21:14:56 -0700 Subject: Problem drytek4 SNF 2011-07-26 21:14:56: Standby button doesn't work Message-ID: I planned to use it, and after I vented, I realized that my sample was not good enough to run etching step. I tried to press 'Standby' button to shut it down, but it seems like it doesn't work. From eenriquez at snf.stanford.edu Wed Jul 27 07:36:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jul 2011 07:36:39 -0700 Subject: Problem drytek4 SNF 2011-07-26 21:14:56: Standby button doesn't work Message-ID: Need to press the Standby several times From eenriquez at snf.stanford.edu Wed Jul 27 09:09:18 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jul 2011 09:09:18 -0700 Subject: Problem drytek4 SNF 2011-07-20 13:12:18: can't tune power in process 3 Message-ID: Ran O2 plasma with no problems. From ehe at snf.stanford.edu Thu Jul 28 14:19:04 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 28 Jul 2011 14:19:04 -0700 Subject: Problem drytek4 SNF 2011-07-28 14:19:04: no CHF3 gas and standby button broken Message-ID: From mdickey at snf.stanford.edu Fri Jul 29 07:27:15 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 29 Jul 2011 07:27:15 -0700 Subject: Comment drytek4 SNF 2011-07-29 07:27:15: Freon 23 Message-ID: The CHF3 bottle is due in today. Currently none available From jperez at snf.stanford.edu Fri Jul 29 11:12:10 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 29 Jul 2011 11:12:10 -0700 Subject: Shutdown drytek4 SNF 2011-07-29 11:12:09: Matching network doesn't seem to be working and Gas flow not working in REM mode Message-ID: From mcvittie at snf.stanford.edu Fri Jul 29 12:02:20 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 29 Jul 2011 12:02:20 -0700 Subject: Shutdown drytek4 SNF 2011-07-29 11:12:09: Matching network doesn't seem to be working and Gas flow not working in REM mode Message-ID: On Drytek4 you now need to start your process by pushing the reset botton. If you do not, the controller gets confused. Jim From mdickey at snf.stanford.edu Fri Jul 29 13:45:27 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 29 Jul 2011 13:45:27 -0700 Subject: Comment drytek4 SNF 2011-07-29 07:27:15: Freon 23 Message-ID: gas back on line From mdickey at snf.stanford.edu Fri Jul 29 13:45:37 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 29 Jul 2011 13:45:37 -0700 Subject: Problem drytek4 SNF 2011-07-28 14:19:04: no CHF3 gas and standby button broken Message-ID: gas back on line