From eenriquez at snf.stanford.edu Wed Jun 1 09:26:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Jun 2011 09:26:51 -0700 Subject: Problem drytek4 SNF 2011-05-31 15:05:26: Does not go to Standby state Message-ID: Repaired shorted wire on cycle start switch. From helencxy at snf.stanford.edu Thu Jun 2 09:44:51 2011 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Thu, 2 Jun 2011 09:44:51 -0700 Subject: Problem drytek4 SNF 2011-06-02 09:44:51: machine won't go into standby Message-ID: I followed the shutdown procedure, but the machine wouldn't go into standby...i left it at vented state. From faridz at snf.stanford.edu Thu Jun 2 15:14:26 2011 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 2 Jun 2011 15:14:26 -0700 Subject: Shutdown drytek4 SNF 2011-06-02 15:14:25: unable to run leaking sound from the back Message-ID: please check the tool . From mdickey at snf.stanford.edu Fri Jun 3 09:47:16 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 3 Jun 2011 09:47:16 -0700 Subject: Shutdown drytek4 SNF 2011-06-02 15:14:25: unable to run leaking sound from the back Message-ID: unable to duplicate problem. ran O2 plasma From jperez at snf.stanford.edu Fri Jun 3 11:18:00 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 3 Jun 2011 11:18:00 -0700 Subject: Shutdown drytek4 SNF 2011-06-03 11:18:00: Three problems, see below Message-ID: 1) TRIED TIMERS 1,2 AND 3. NONE WILL STOP PER TIME SET. 2) DISPLAY OF PROCESS BUTTON USING SHOWS ALL THREE (1,2,3,) SHOULD ONLY SHOW WHAT PROCESS BUTTON RUNNING. 3) NOT AUTOMATICALLY VENTING AFTER PRESSING "CLEAR WFR" From eenriquez at snf.stanford.edu Fri Jun 3 12:30:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Jun 2011 12:30:48 -0700 Subject: Comment drytek4 SNF 2011-06-03 12:30:47: Update Message-ID: System logic problem. Need to check the power supplies. From eenriquez at snf.stanford.edu Wed Jun 8 19:40:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Jun 2011 19:40:21 -0700 Subject: Comment drytek4 SNF 2011-06-08 19:40:21: Update Message-ID: Troubleshooting logic problem. Installed spare controller but it did not fix the problem. From cbaxter at snf.stanford.edu Thu Jun 9 10:49:52 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Jun 2011 10:49:52 -0700 Subject: Shutdown drytek4 SNF 2011-06-03 11:18:00: Three problems, see below Message-ID: Elmer changed the u3,u4 and u5 chips on the i/o pcb and also moved i/o pcb to different slot on the mother board. Still have a intermttent problem with standby mode. Tool is ok use... From eenriquez at snf.stanford.edu Thu Jun 9 13:09:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Jun 2011 13:09:48 -0700 Subject: Comment drytek4 SNF 2011-06-08 19:40:21: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 9 13:09:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Jun 2011 13:09:57 -0700 Subject: Comment drytek4 SNF 2011-06-03 12:30:47: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 9 13:14:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Jun 2011 13:14:30 -0700 Subject: Comment drytek4 SNF 2011-06-09 13:14:29: Update "won't go into Standby" Message-ID: Need to replace the standby switch and re-solder all button switch connections. We will do this either this weekend or sometime next week. From heyi at snf.stanford.edu Sun Jun 12 15:00:12 2011 From: heyi at snf.stanford.edu (heyi at snf.stanford.edu) Date: Sun, 12 Jun 2011 15:00:12 -0700 Subject: Problem drytek4 SNF 2011-06-12 15:00:11: cannot open the chamber Message-ID: After I finished purging gas for the first cycle, the chamber can not be opened. I pressed clear wafer button and nothing happens. The system is frozen. From cbaxter at snf.stanford.edu Sun Jun 12 21:40:49 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 12 Jun 2011 21:40:49 -0700 Subject: Problem drytek4 SNF 2011-06-02 09:44:51: machine won't go into standby Message-ID: From cbaxter at snf.stanford.edu Sun Jun 12 21:41:56 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 12 Jun 2011 21:41:56 -0700 Subject: Problem drytek4 SNF 2011-06-12 15:00:11: cannot open the chamber Message-ID: Was able to vent chamber and ran w/out problem. From jimkruger at snf.stanford.edu Mon Jun 13 14:02:41 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 13 Jun 2011 14:02:41 -0700 Subject: Comment drytek4 SNF 2011-06-13 14:02:40: Seems OK, but: Message-ID: My std O2 clean: 50 watts, 150 mTorr, 100% O2, 1 min. works as usual. It seemed that I needed "micro reset" before it would go into Standby. From ehe at snf.stanford.edu Thu Jun 23 16:48:35 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 23 Jun 2011 16:48:35 -0700 Subject: Shutdown drytek4 SNF 2011-06-23 16:48:34: problem with drytek4 Message-ID: series of loud clicks, gas #3 deviation light turned red, could not remove wafers no matter what button sequence i tried. From cbaxter at snf.stanford.edu Fri Jun 24 09:38:07 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 24 Jun 2011 09:38:07 -0700 Subject: Shutdown drytek4 SNF 2011-06-23 16:48:34: problem with drytek4 Message-ID: Removed wafer and put system on stand by.. From zzp at snf.stanford.edu Fri Jun 24 16:07:35 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 24 Jun 2011 16:07:35 -0700 Subject: Problem drytek4 SNF 2011-06-24 16:07:35: couldn't run process 1 or 2 Message-ID: tried a couple of times but didn't make it work; LED readings are weird. From ehe at snf.stanford.edu Sun Jun 26 14:34:50 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 26 Jun 2011 14:34:50 -0700 Subject: Shutdown drytek4 SNF 2011-06-26 14:34:49: not working. no pressure on processes. red lights on. Message-ID: From ehe at snf.stanford.edu Sun Jun 26 14:38:07 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 26 Jun 2011 14:38:07 -0700 Subject: Comment drytek4 SNF 2011-06-26 14:38:06: shutdown due to same problem as on 6/23 Message-ID: From eenriquez at snf.stanford.edu Mon Jun 27 15:01:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Jun 2011 15:01:51 -0700 Subject: Comment drytek4 SNF 2011-06-27 15:01:50: Update Message-ID: Having logic problem again. Continuing to troubleshoot. From cbaxter at snf.stanford.edu Thu Jun 30 10:38:07 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:38:07 -0700 Subject: Shutdown drytek4 SNF 2011-06-26 14:34:49: not working. no pressure on processes. red lights on. Message-ID: Still a problem with system going to standby mode, but process sequence's is working fine now. Need to change the intermittent cycle start switch, the system is ok to run process. When putting the system on standby mode need to press the cycle start switch at lease 5x for system to go on standby mode. I will look for a replacement cycle start switch...