Problem drytek4 SNF 2011-06-12 15:00:11: cannot open the chamber

heyi at snf.stanford.edu heyi at snf.stanford.edu
Sun Jun 12 15:00:12 PDT 2011

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After I finished purging gas for the first cycle, the chamber can not be opened. I pressed clear wafer button and nothing happens. The system is frozen.

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