From paik at snf.stanford.edu Mon May 2 15:47:19 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Mon, 2 May 2011 15:47:19 -0700 Subject: Problem drytek4 SNF 2011-05-02 15:47:19: standby button jammed in Message-ID: From paik at snf.stanford.edu Mon May 2 16:25:34 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Mon, 2 May 2011 16:25:34 -0700 Subject: Shutdown drytek4 SNF 2011-05-02 16:25:33: Standby button jammed Message-ID: the button is jammed and the machine is in constant standby mode. From eenriquez at snf.stanford.edu Tue May 3 09:07:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 May 2011 09:07:35 -0700 Subject: Shutdown drytek4 SNF 2011-05-02 16:25:33: Standby button jammed Message-ID: Unjammed the button. From eenriquez at snf.stanford.edu Tue May 3 09:08:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 May 2011 09:08:37 -0700 Subject: Problem drytek4 SNF 2011-05-02 15:47:19: standby button jammed in Message-ID: Unjammed the button. From ychai at snf.stanford.edu Wed May 4 16:09:58 2011 From: ychai at snf.stanford.edu (ychai at snf.stanford.edu) Date: Wed, 4 May 2011 16:09:58 -0700 Subject: Problem drytek4 SNF 2011-05-04 16:09:57: Standby Pressure Message-ID: The standyby pressure is not in the normal range (200-400mTorr) when I start to use. The pressure displays 14mTorr. Tiried to increase the pressure, but doesn't work. From eenriquez at snf.stanford.edu Thu May 5 08:27:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 May 2011 08:27:15 -0700 Subject: Problem drytek4 SNF 2011-05-04 16:09:57: Standby Pressure Message-ID: No problem found. Ran an O2 plasma and placed in standby. From cursive at snf.stanford.edu Fri May 6 14:39:54 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 6 May 2011 14:39:54 -0700 Subject: Problem drytek4 SNF 2011-05-06 14:39:54: timer #3 thumbwheel problem Message-ID: It can't work for adjusting the etching time. From cbaxter at snf.stanford.edu Sat May 7 07:14:23 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 May 2011 07:14:23 -0700 Subject: Comment drytek4 SNF 2011-05-07 07:14:22: Thumbwheel#3 Message-ID: The recipe#3 thumbwheel is bad, the minute wheel is jammed and will not turn. The thumbwheel will need to be change, will look for a spare thumbwheel.. From cbaxter at snf.stanford.edu Tue May 10 10:09:33 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 May 2011 10:09:33 -0700 Subject: Problem drytek4 SNF 2011-05-06 14:39:54: timer #3 thumbwheel problem Message-ID: Changed recipe#3 thumbwheel... From jperez at snf.stanford.edu Tue May 17 10:00:33 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 May 2011 10:00:33 -0700 Subject: Comment drytek4 SNF 2011-05-07 07:14:22: Thumbwheel#3 Message-ID: Thumbwheel #3has been replaced. From faridz at snf.stanford.edu Wed May 18 14:37:35 2011 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 18 May 2011 14:37:35 -0700 Subject: Problem drytek4 SNF 2011-05-18 14:37:35: Timer 3 doesn't stop Message-ID: Process 3 (Timer 3) doesn't stop on desire time i had to manually stop each time. please check. From cbaxter at snf.stanford.edu Sun May 22 04:24:20 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 May 2011 04:24:20 -0700 Subject: Problem drytek4 SNF 2011-05-18 14:37:35: Timer 3 doesn't stop Message-ID: Reset system and tested using all three recieps.. From mcherry at snf.stanford.edu Mon May 23 11:24:30 2011 From: mcherry at snf.stanford.edu (mcherry at snf.stanford.edu) Date: Mon, 23 May 2011 11:24:30 -0700 Subject: Problem drytek4 SNF 2011-05-23 11:24:29: O2 Valve Message-ID: Found the round O2 valve fully open, very tightly cranked in this position. After some trouble, managed to unlock it and returned it to normal, partially open position. Purged line with valve closed - seemed to be sealed. (Flow reached -0.7%). From eenriquez at snf.stanford.edu Wed May 25 08:32:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 May 2011 08:32:01 -0700 Subject: Problem drytek4 SNF 2011-05-23 11:24:29: O2 Valve Message-ID: O2 valve is Ok now. From popomoo at snf.stanford.edu Fri May 27 19:56:11 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 27 May 2011 19:56:11 -0700 Subject: Shutdown drytek4 SNF 2011-05-27 19:56:11: STANDBY button is stuck inside. Message-ID: From eenriquez at snf.stanford.edu Tue May 31 14:58:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 May 2011 14:58:46 -0700 Subject: Shutdown drytek4 SNF 2011-05-27 19:56:11: STANDBY button is stuck inside. Message-ID: Repaired the stuck button but now the system will not go to the standby state (chamber pumped down with a purge). From eenriquez at snf.stanford.edu Tue May 31 15:05:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 May 2011 15:05:27 -0700 Subject: Problem drytek4 SNF 2011-05-31 15:05:26: Does not go to Standby state Message-ID: The system will not go to the standby state.Need further troubleshooting.When you're finished with your process, just close the chamber and leave it vented. The chamber has an N2 purge so this should keep the chamber clean.