Problem drytek4 SNF 2011-05-04 16:09:57: Standby Pressure

ychai at snf.stanford.edu ychai at snf.stanford.edu
Wed May 4 16:09:58 PDT 2011


The standyby pressure is not in the normal range (200-400mTorr) when I start to use. The pressure displays 14mTorr. Tiried to increase the pressure, but doesn't work.




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