Problem drytek4 SNF 2011-05-31 15:05:26: Does not go to Standby state

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 31 15:05:27 PDT 2011


The system will not go to the standby state.Need further troubleshooting.When you're finished with your process,  just close the chamber and leave it vented. The chamber has an N2 purge so this should keep the chamber clean.




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