From sclaussen at snf.stanford.edu Thu Nov 3 00:13:15 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 3 Nov 2011 00:13:15 -0700 Subject: Problem drytek4 SNF 2011-11-03 00:13:15: Could not tune RF for process 1 Message-ID: For some reason, I could not tune the RF for process 1. Almost all of the power was being reflected. Did not end up running process. From jperez at snf.stanford.edu Thu Nov 3 07:08:39 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 Nov 2011 07:08:39 -0700 Subject: Problem drytek4 SNF 2011-11-03 00:13:15: Could not tune RF for process 1 Message-ID: There are three processes that you could use, if having trouble with the reflective power switch to one of the other processes. Please indicate which gases you were attempting to use.and power. From jperez at snf.stanford.edu Thu Nov 3 11:32:59 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 Nov 2011 11:32:59 -0700 Subject: Shutdown drytek4 SNF 2011-11-03 11:32:59: Unable to tune reflective power on any of the three pots Message-ID: From cbaxter at snf.stanford.edu Thu Nov 3 18:45:15 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 3 Nov 2011 18:45:15 -0700 Subject: Comment drytek4 SNF 2011-11-03 18:45:14: RF won't tune Message-ID: It looks like the a problem with the rf match, will need to remove the rf match and check the coupling. From eenriquez at snf.stanford.edu Fri Nov 4 12:12:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2011 12:12:25 -0700 Subject: Shutdown drytek4 SNF 2011-11-03 11:32:59: Unable to tune reflective power on any of the three pots Message-ID: The coil variable capacitor coupling inside the matching network came loose. Retightened the coupler and ran O2 plasma. From eenriquez at snf.stanford.edu Fri Nov 4 12:12:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2011 12:12:35 -0700 Subject: Comment drytek4 SNF 2011-11-03 18:45:14: RF won't tune Message-ID: Archived From ehe at snf.stanford.edu Mon Nov 7 11:42:19 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 7 Nov 2011 11:42:19 -0800 Subject: Problem drytek4 SNF 2011-11-07 11:42:18: wafers don't fit into chuck Message-ID: My 4" wafers have not fit into the chuck (they don't lie flat in the wafer cutout) for a couple months.. they have a couple microns of epitaxy on either edge and have edge bead removal around he edges using the coater track. not sure if it's related but i have not been able to repeat results from april and SEMS of structures show the sidewall profile has gone from a neat 5-deg to a real mess (think melting upside-down peanut butter cup) so something has really changed since april. I tried in july and october and can't get good results again so i have to move to another etch tool for that process. From ehe at snf.stanford.edu Mon Nov 7 12:38:31 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 7 Nov 2011 12:38:31 -0800 Subject: Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6 Message-ID: My wafers came from p5000 and might have had some polymer, but usually sf6 etched sige pretty quickly (1um-2um/min) From jperez at snf.stanford.edu Tue Nov 8 07:41:16 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 8 Nov 2011 07:41:16 -0800 Subject: Problem drytek4 SNF 2011-11-07 11:42:18: wafers don't fit into chuck Message-ID: Our standard four inch wafers fit. If do to processing it may can fit correctly From yiwu at snf.stanford.edu Wed Nov 16 16:20:29 2011 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Wed, 16 Nov 2011 16:20:29 -0800 Subject: Problem drytek4 SNF 2011-11-16 16:20:28: Unstable plasma Message-ID: During seasoning, we cannot get stable plasma nor refelection power to minimized. When change the coil, the forward power is also jumping around. From eenriquez at snf.stanford.edu Thu Nov 17 09:10:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Nov 2011 09:10:52 -0800 Subject: Problem drytek4 SNF 2011-11-16 16:20:28: Unstable plasma Message-ID: No problem found. Ran O2 plasma with no problems. Plasma and bias voltage readout was very stable. From ehe at snf.stanford.edu Sat Nov 19 11:58:21 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 19 Nov 2011 11:58:21 -0800 Subject: Problem drytek4 SNF 2011-11-19 11:58:21: timer not working Message-ID: Be careful, do not leave your wafers unattended - hitting micro reset button does not fix problem either From ehe at snf.stanford.edu Sat Nov 19 17:55:45 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 19 Nov 2011 17:55:45 -0800 Subject: Problem drytek4 SNF 2011-11-19 17:55:44: couldn't tune power on any channel Message-ID: From kcbalram at snf.stanford.edu Sun Nov 20 08:31:38 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 20 Nov 2011 08:31:38 -0800 Subject: Shutdown drytek4 SNF 2011-11-20 08:31:38: Can not tune RF power Message-ID: From eenriquez at snf.stanford.edu Wed Nov 23 16:37:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Nov 2011 16:37:28 -0800 Subject: Shutdown drytek4 SNF 2011-11-20 08:31:38: Can not tune RF power Message-ID: Tightened RF connections. Now all 3 Process are tuned for O2 plasma. Also verified that all 3 timers are functioning. From eenriquez at snf.stanford.edu Wed Nov 23 16:37:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Nov 2011 16:37:54 -0800 Subject: Problem drytek4 SNF 2011-11-19 17:55:44: couldn't tune power on any channel Message-ID: Tightened RF connections. Now all 3 Process are tuned for O2 plasma. Also verified that all 3 timers are functioning. From eenriquez at snf.stanford.edu Wed Nov 23 16:39:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Nov 2011 16:39:28 -0800 Subject: Problem drytek4 SNF 2011-11-19 11:58:21: timer not working Message-ID: Verified that all 3 timers are functioning. Please make sure that the toggle switch below each of the Process buttons are set to TIME instead of LASER. From carterlin at snf.stanford.edu Sat Nov 26 15:02:12 2011 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Sat, 26 Nov 2011 15:02:12 -0800 Subject: Problem drytek4 SNF 2011-11-26 15:02:11: Cannot start process Message-ID: No response when pushing start cycle buttom. Cannot start any process or standby From ehe at snf.stanford.edu Sat Nov 26 19:23:37 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 26 Nov 2011 19:23:37 -0800 Subject: Problem drytek4 SNF 2011-11-26 19:23:36: could not run any process or microreset Message-ID: From hongyuc at snf.stanford.edu Sun Nov 27 10:09:11 2011 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Sun, 27 Nov 2011 10:09:11 -0800 Subject: Problem drytek4 SNF 2011-11-27 10:09:11: no response when hitting standby button Message-ID: From eenriquez at snf.stanford.edu Mon Nov 28 08:45:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 08:45:40 -0800 Subject: Shutdown drytek4 SNF 2011-11-28 08:45:39: Leaky pneumatic solenoid Message-ID: Need to replace a leaky pneumatic solenoid for isolation valve. From mdickey at snf.stanford.edu Mon Nov 28 12:47:31 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 28 Nov 2011 12:47:31 -0800 Subject: Shutdown drytek4 SNF 2011-11-28 08:45:39: Leaky pneumatic solenoid Message-ID: replaced solenoid From eenriquez at snf.stanford.edu Mon Nov 28 14:08:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:08:27 -0800 Subject: Problem drytek4 SNF 2011-11-27 10:09:11: no response when hitting standby button Message-ID: Replaced leaky isolation valve solenoid. From eenriquez at snf.stanford.edu Mon Nov 28 14:08:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:08:47 -0800 Subject: Problem drytek4 SNF 2011-11-26 19:23:36: could not run any process or microreset Message-ID: Replaced leaky isolation valve solenoid. From eenriquez at snf.stanford.edu Mon Nov 28 14:08:59 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:08:59 -0800 Subject: Problem drytek4 SNF 2011-11-26 15:02:11: Cannot start process Message-ID: Replaced leaky isolation valve solenoid. From jperez at snf.stanford.edu Mon Nov 28 14:53:51 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:53:51 -0800 Subject: Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6 Message-ID: Ready to use, all three process running O2 plasma. From jperez at snf.stanford.edu Mon Nov 28 14:55:01 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:55:01 -0800 Subject: Comment drytek4 SNF 2011-03-31 09:50:13: Completed monthly PM Message-ID: Thanks,