Shutdown drytek4 SNF 2011-11-03 11:32:59: Unable to tune reflective power on any of the three pots
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Thu Nov 3 11:32:59 PDT 2011
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Problem drytek4 SNF 2011-11-03 00:13:15: Could not tune RF for process 1
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Shutdown drytek4 SNF 2011-11-03 11:32:59: Unable to tune reflective power on any of the three pots
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Problem drytek4 SNF 2011-11-03 00:13:15: Could not tune RF for process 1
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Shutdown drytek4 SNF 2011-11-03 11:32:59: Unable to tune reflective power on any of the three pots
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