Shutdown drytek4 SNF 2011-11-03 11:32:59: Unable to tune reflective power on any of the three pots

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Nov 4 12:12:25 PDT 2011


The coil variable capacitor coupling inside the matching network came loose.  Retightened the coupler and ran O2 plasma.




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