Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6

ehe at snf.stanford.edu ehe at snf.stanford.edu
Mon Nov 7 12:38:31 PST 2011


My wafers came from p5000 and might have had some polymer, but usually sf6 etched sige pretty quickly (1um-2um/min)




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