Problem drytek4 SNF 2011-11-16 16:20:28: Unstable plasma

yiwu at snf.stanford.edu yiwu at snf.stanford.edu
Wed Nov 16 16:20:29 PST 2011

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During seasoning, we cannot get stable plasma nor refelection power to minimized. When change the coil, the forward power is also jumping around.

Previous message: Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6
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