Shutdown drytek4 SNF 2011-11-20 08:31:38: Can not tune RF power

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Nov 23 16:37:28 PST 2011


Tightened RF connections.  Now all 3 Process are tuned for O2 plasma.  Also verified that all 3 timers are functioning. 




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