Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Nov 28 14:53:51 PST 2011

Previous message: Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6
Next message: Problem drytek4 SNF 2011-11-16 16:20:28: Unstable plasma
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ready to use, all three process running O2 plasma.

Previous message: Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6
Next message: Problem drytek4 SNF 2011-11-16 16:20:28: Unstable plasma
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the drytek4-pcs mailing list