November 2011 Archives by date

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Starting: Thu Nov 3 00:13:15 PDT 2011
Ending: Mon Nov 28 14:55:01 PST 2011
Messages: 27

• Problem drytek4 SNF 2011-11-03 00:13:15: Could not tune RF for process 1   sclaussen at snf.stanford.edu
• Problem drytek4 SNF 2011-11-03 00:13:15: Could not tune RF for process 1   jperez at snf.stanford.edu
• Shutdown drytek4 SNF 2011-11-03 11:32:59: Unable to tune reflective power on any of the three pots   jperez at snf.stanford.edu
• Comment drytek4 SNF 2011-11-03 18:45:14: RF won't tune   cbaxter at snf.stanford.edu
• Shutdown drytek4 SNF 2011-11-03 11:32:59: Unable to tune reflective power on any of the three pots   eenriquez at snf.stanford.edu
• Comment drytek4 SNF 2011-11-03 18:45:14: RF won't tune   eenriquez at snf.stanford.edu
• Problem drytek4 SNF 2011-11-07 11:42:18: wafers don't fit into chuck   ehe at snf.stanford.edu
• Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6   ehe at snf.stanford.edu
• Problem drytek4 SNF 2011-11-07 11:42:18: wafers don't fit into chuck   jperez at snf.stanford.edu
• Problem drytek4 SNF 2011-11-16 16:20:28: Unstable plasma   yiwu at snf.stanford.edu
• Problem drytek4 SNF 2011-11-16 16:20:28: Unstable plasma   eenriquez at snf.stanford.edu
• Problem drytek4 SNF 2011-11-19 11:58:21: timer not working   ehe at snf.stanford.edu
• Problem drytek4 SNF 2011-11-19 17:55:44: couldn't tune power on any channel   ehe at snf.stanford.edu
• Shutdown drytek4 SNF 2011-11-20 08:31:38: Can not tune RF power   kcbalram at snf.stanford.edu
• Shutdown drytek4 SNF 2011-11-20 08:31:38: Can not tune RF power   eenriquez at snf.stanford.edu
• Problem drytek4 SNF 2011-11-19 17:55:44: couldn't tune power on any channel   eenriquez at snf.stanford.edu
• Problem drytek4 SNF 2011-11-19 11:58:21: timer not working   eenriquez at snf.stanford.edu
• Problem drytek4 SNF 2011-11-26 15:02:11: Cannot start process   carterlin at snf.stanford.edu
• Problem drytek4 SNF 2011-11-26 19:23:36: could not run any process or microreset   ehe at snf.stanford.edu
• Problem drytek4 SNF 2011-11-27 10:09:11: no response when hitting standby button   hongyuc at snf.stanford.edu
• Shutdown drytek4 SNF 2011-11-28 08:45:39: Leaky pneumatic solenoid   eenriquez at snf.stanford.edu
• Shutdown drytek4 SNF 2011-11-28 08:45:39: Leaky pneumatic solenoid   mdickey at snf.stanford.edu
• Problem drytek4 SNF 2011-11-27 10:09:11: no response when hitting standby button   eenriquez at snf.stanford.edu
• Problem drytek4 SNF 2011-11-26 19:23:36: could not run any process or microreset   eenriquez at snf.stanford.edu
• Problem drytek4 SNF 2011-11-26 15:02:11: Cannot start process   eenriquez at snf.stanford.edu
• Comment drytek4 SNF 2011-11-07 12:38:30: no appreciable etch rate w/ SF6   jperez at snf.stanford.edu
• Comment drytek4 SNF 2011-03-31 09:50:13: Completed monthly PM   jperez at snf.stanford.edu

Last message date: Mon Nov 28 14:55:01 PST 2011
Archived on: Fri Jan 11 13:05:46 PST 2013

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