From altamash at snf.stanford.edu Sat Oct 1 13:14:39 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 1 Oct 2011 13:14:39 -0700 Subject: Comment drytek4 SNF 2011-10-01 13:14:38: some white residue on the plate Message-ID: tried cleaning with acetone and pg remover, does not clean From jperez at snf.stanford.edu Mon Oct 3 07:03:54 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 3 Oct 2011 07:03:54 -0700 Subject: Comment drytek4 SNF 2011-10-01 13:14:38: some white residue on the plate Message-ID: Try an O2 clean, but it looks like someone's gloves were unclean (could be anything like (acid) and that won't come off. From jperez at snf.stanford.edu Mon Oct 3 10:33:01 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 3 Oct 2011 10:33:01 -0700 Subject: Problem drytek4 SNF 2011-09-30 16:23:55: Unable to maintain pressure or strike plasma Message-ID: Everything stable. The copper ground was wriggled and O2 actual became stable. From jparker at snf.stanford.edu Tue Oct 11 17:09:21 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 11 Oct 2011 17:09:21 -0700 Subject: Problem drytek4 SNF 2011-10-11 17:09:20: Standby button, delays Message-ID: 3 issues: [1] There can be long delays. For instance, after hitting 'cycle start' it may take up to a minute before gas starts flowing. Be Patient. [2] Standby button can get stuck depressed. Simple fix is gently grab its edges with fingernails (gloved still, obviously) and wiggle it until it releases. [3] Cycle start sometimes (may happen every 2-6 runs) sends equipment into standby even when process buttons are lit. This can be diagnosed by seeing the pressure go to 250 and the process not start. Hit micro reset and let purging cycle, then try cycle start again. From jparker at snf.stanford.edu Tue Oct 11 17:23:38 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 11 Oct 2011 17:23:38 -0700 Subject: Comment drytek4 SNF 2011-10-11 17:23:37: Standby note Message-ID: If hitting 'cycle start' to go into standby doesn't seem to be working, holding 'cycle start' for 10 seconds (with standby button lit as usual) seems to be a workaround. From jperez at snf.stanford.edu Fri Oct 14 07:04:58 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 14 Oct 2011 07:04:58 -0700 Subject: Comment drytek4 SNF 2011-10-11 17:23:37: Standby note Message-ID: Do not leave in stand-by From jperez at snf.stanford.edu Fri Oct 14 07:05:31 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 14 Oct 2011 07:05:31 -0700 Subject: Problem drytek4 SNF 2011-10-11 17:09:20: Standby button, delays Message-ID: Do not leave in stand-by. From jperez at snf.stanford.edu Fri Oct 14 07:06:05 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 14 Oct 2011 07:06:05 -0700 Subject: Comment drytek4 SNF 2011-08-11 18:52:59: Standby button problem Message-ID: Do not have to leave drytek 4 in stand-by From ehe at snf.stanford.edu Mon Oct 17 16:25:16 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 17 Oct 2011 16:25:16 -0700 Subject: Shutdown drytek4 SNF 2011-10-17 16:25:15: can't use, standby button jammed Message-ID: From cbaxter at snf.stanford.edu Mon Oct 17 17:04:20 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Oct 2011 17:04:20 -0700 Subject: Shutdown drytek4 SNF 2011-10-17 16:25:15: can't use, standby button jammed Message-ID: Changed standby button switch... From kcbalram at snf.stanford.edu Fri Oct 21 05:45:27 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Fri, 21 Oct 2011 05:45:27 -0700 Subject: Problem drytek4 SNF 2011-10-21 05:45:26: Not able to tune RF power Message-ID: Could not get reflected power to be < 5W. During the dry run, the system was fine but after loading the sample, the reflected power went up. Tried tuning it to get it down to less than 5W but was not able to do it. Not sure what the problem is. I was using the system after a very long time, so I could be missing something here best, Krishna From cbaxter at snf.stanford.edu Fri Oct 21 07:03:31 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Oct 2011 07:03:31 -0700 Subject: Problem drytek4 SNF 2011-10-21 05:45:26: Not able to tune RF power Message-ID: Ran 02 plasma and was able to tuned to zero reflective w/out problem. From jperez at snf.stanford.edu Tue Oct 25 10:11:40 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 25 Oct 2011 10:11:40 -0700 Subject: Problem drytek4 SNF 2011-10-25 10:11:40: The Cycle Hold button isn't working Message-ID: i tried the cycle hold button twice and both times it stop the etch and vent I wanted to by pass the timer for training. From mdickey at snf.stanford.edu Fri Oct 28 06:04:36 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Oct 2011 06:04:36 -0700 Subject: Shutdown drytek4 SNF 2011-10-28 06:04:36: tie in Message-ID: Down for flow meter tie in From mdickey at snf.stanford.edu Fri Oct 28 13:44:37 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Oct 2011 13:44:37 -0700 Subject: Shutdown drytek4 SNF 2011-10-28 06:04:36: tie in Message-ID: tie in complete