From ntayebi at snf.stanford.edu Sun Apr 8 11:05:52 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 8 Apr 2012 11:05:52 -0700 Subject: Comment drytek4 SNF 2012-04-08 11:05:52: CHF3 plasma flickering Message-ID: Tried to perform CHF3 etch but the plasma was not stable at all and the reflected power kept fluctuating like crazy. Not sure what's wrong. O2 plasma is very stable and works nicely From ntayebi at snf.stanford.edu Sun Apr 8 11:06:30 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 8 Apr 2012 11:06:30 -0700 Subject: Problem drytek4 SNF 2012-04-08 11:06:30: CHF3 plasma flickering Message-ID: Tried to perform CHF3 etch but the plasma was not stable at all and the reflected power kept fluctuating like crazy. Not sure what's wrong. O2 plasma is very stable and works nicely From cbaxter at snf.stanford.edu Mon Apr 9 18:38:58 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Apr 2012 18:38:58 -0700 Subject: Problem drytek4 SNF 2012-04-08 11:06:30: CHF3 plasma flickering Message-ID: Used process#2 using Chf3 and O2 gases, RF plasma is good and stable with less than 5 watts reflective. From jperez at snf.stanford.edu Mon Apr 16 07:15:31 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 16 Apr 2012 07:15:31 -0700 Subject: Comment drytek4 SNF 2012-04-08 11:05:52: CHF3 plasma flickering Message-ID: Tried the same set-up with process 2 and it worked. Move to any of the other processes (number) when a process that you like or use isn't working until maintenance can get the problem. From jperez at snf.stanford.edu Tue Apr 24 15:03:16 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 Apr 2012 15:03:16 -0700 Subject: Problem drytek4 SNF 2012-04-24 15:03:15: Cycle Hold when pressed isn't working Message-ID: When pressed the timer should continue timing and plasma should continue etching. When I pressed Cycle hold it actually stopped the timer and the plasma shut off. It wouldn't automatically vent. I had to press the blue button (microprocessor) to get it to vent. I tried the cycle hold button again and it still isn't doing what it should do. From cbaxter at snf.stanford.edu Tue Apr 24 17:12:17 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 24 Apr 2012 17:12:17 -0700 Subject: Problem drytek4 SNF 2012-04-24 15:03:15: Cycle Hold when pressed isn't working Message-ID: Reseated the cpu comtroller pcb and cycled the on 3 strep process w/out problem.