Comment drytek4 SNF 2012-04-08 11:05:52: CHF3 plasma flickering

ntayebi at ntayebi at
Sun Apr 8 11:05:52 PDT 2012

Tried to perform CHF3 etch but the plasma was not stable at all and the reflected power kept fluctuating like crazy.  Not sure what's wrong. O2 plasma is very stable and works nicely

More information about the drytek4-pcs mailing list