Problem drytek4 SNF 2012-04-08 11:06:30: CHF3 plasma flickering

ntayebi at snf.stanford.edu ntayebi at snf.stanford.edu
Sun Apr 8 11:06:30 PDT 2012


Tried to perform CHF3 etch but the plasma was not stable at all and the reflected power kept fluctuating like crazy.  Not sure what's wrong. O2 plasma is very stable and works nicely




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