Problem drytek4 SNF 2012-04-08 11:06:30: CHF3 plasma flickering

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Apr 9 18:38:58 PDT 2012


Used process#2 using Chf3 and O2 gases, RF plasma is
good and stable with less than 5 watts reflective.




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