From eenriquez at snf.stanford.edu Tue Feb 7 14:52:23 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Feb 2012 14:52:23 -0800 Subject: Shutdown drytek4 SNF 2011-12-14 14:10:14: scheduled shutdown Message-ID: System has been restarted. From eenriquez at snf.stanford.edu Tue Feb 7 14:53:01 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Feb 2012 14:53:01 -0800 Subject: Problem drytek4 SNF 2012-02-07 14:53:00: Needs process qualification Message-ID: Completed monthly PM. Needs process checks. From eenriquez at snf.stanford.edu Wed Feb 8 07:49:17 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Feb 2012 07:49:17 -0800 Subject: Shutdown drytek4 SNF 2012-02-08 07:49:17: Facility work Message-ID: From jperez at snf.stanford.edu Thu Feb 9 11:51:06 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 9 Feb 2012 11:51:06 -0800 Subject: Comment drytek4 SNF 2012-02-09 11:51:05: Test Qual was GOOD Message-ID: Ran two test wafers, one with a thicker thermal oxide for four minutes and a thinner thermal oxide for two minutes. Results were' 4 min etch 228A/min. 2min etch 222A/min. From eenriquez at snf.stanford.edu Tue Feb 14 11:15:34 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:15:34 -0800 Subject: Problem drytek4 SNF 2012-02-07 14:53:00: Needs process qualification Message-ID: Process qualification test have been completed From eenriquez at snf.stanford.edu Tue Feb 14 11:15:50 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:15:50 -0800 Subject: Shutdown drytek4 SNF 2012-02-08 07:49:17: Facility work Message-ID: Facility work completed