From cbaxter at snf.stanford.edu Mon Jul 2 06:32:31 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Jul 2012 06:32:31 -0700 Subject: Shutdown drytek4 SNF 2012-07-02 06:32:30: Pumping out C4F8. Message-ID: The delivery pressure for the C4F8 is above 30psi, it should be at 10psi. Pumping out C4F8 gas line... From eenriquez at snf.stanford.edu Mon Jul 2 09:52:07 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jul 2012 09:52:07 -0700 Subject: Shutdown drytek4 SNF 2012-07-02 06:32:30: Pumping out C4F8. Message-ID: No problem with the tool. From eenriquez at snf.stanford.edu Mon Jul 2 09:52:23 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jul 2012 09:52:23 -0700 Subject: Comment drytek4 SNF 2012-07-02 09:52:23: Pumping out the C4F8 Message-ID: From sparacio at snf.stanford.edu Fri Jul 13 23:35:04 2012 From: sparacio at snf.stanford.edu (sparacio at snf.stanford.edu) Date: Fri, 13 Jul 2012 23:35:04 -0700 Subject: Problem drytek4 SNF 2012-07-13 23:35:04: plasma flickering Message-ID: With O2 plasma, at 150mtorr, and 50W of power. When the process started, the plasma began to flicker. Also, Rev. power was very high and when lowered, forward power dropped immediately to zero. Killed the process immediately and did a reset of the machine. From popomoo at snf.stanford.edu Sat Jul 14 22:32:42 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sat, 14 Jul 2012 22:32:42 -0700 Subject: Problem drytek4 SNF 2012-07-14 22:32:42: system does not start Message-ID: After all the gas was pumped out, I pressed the 'CYCLE START'. However, it pumped down but the process didn't start. From maxms at snf.stanford.edu Sun Jul 15 06:42:41 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 15 Jul 2012 06:42:41 -0700 Subject: Problem drytek4 SNF 2012-07-15 06:42:40: down as well... Message-ID: tried pressing microreset like a billion times... it doesn't go through the normal process (I can tell by the sounds), and nothing changes. can not get to pump down/ start any process.... cool back-up for MRC! From jperez at snf.stanford.edu Mon Jul 16 07:06:30 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 16 Jul 2012 07:06:30 -0700 Subject: Comment drytek4 SNF 2011-08-05 15:27:53: OK not to put Drytek 4 in Stand-by for the week-end Message-ID: If you don't leave Drytek 4 in standby after several trys it's ok to disable and walk away.eeeeeeeeeeeeeeeeeeee From mtang at snf.stanford.edu Mon Jul 16 08:15:04 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 16 Jul 2012 08:15:04 -0700 Subject: Shutdown drytek4 SNF 2012-07-16 08:15:04: Process does not start Message-ID: From mdickey at snf.stanford.edu Mon Jul 16 10:34:28 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 16 Jul 2012 10:34:28 -0700 Subject: Shutdown drytek4 SNF 2012-07-16 08:15:04: Process does not start Message-ID: Someone had the throttle valve controller in the closed position. Machine is now functional From cbaxter at snf.stanford.edu Mon Jul 16 12:10:27 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Jul 2012 12:10:27 -0700 Subject: Problem drytek4 SNF 2012-07-15 06:42:40: down as well... Message-ID: Throtle valve controller was on close position. From cbaxter at snf.stanford.edu Mon Jul 16 12:10:33 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Jul 2012 12:10:33 -0700 Subject: Problem drytek4 SNF 2012-07-14 22:32:42: system does not start Message-ID: From cbaxter at snf.stanford.edu Mon Jul 16 12:10:40 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Jul 2012 12:10:40 -0700 Subject: Problem drytek4 SNF 2012-07-13 23:35:04: plasma flickering Message-ID: From sparacio at snf.stanford.edu Tue Jul 17 02:04:37 2012 From: sparacio at snf.stanford.edu (sparacio at snf.stanford.edu) Date: Tue, 17 Jul 2012 02:04:37 -0700 Subject: Problem drytek4 SNF 2012-07-17 02:04:36: can't enter standby Message-ID: worked fine all day. went to go put it in standby and it does not pump. tried microreset. still jumps to a high pressure and the buttons are not responsive From jperez at snf.stanford.edu Tue Jul 17 07:10:39 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Jul 2012 07:10:39 -0700 Subject: Problem drytek4 SNF 2012-07-17 02:04:36: can't enter standby Message-ID: The start button needs to pressed more than once, when pressing the start button pause for 3e0 seconds before pressing again. From cbaxter at snf.stanford.edu Tue Jul 17 09:13:06 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 09:13:06 -0700 Subject: Shutdown drytek4 SNF 2012-07-17 09:13:05: Pump down problem Message-ID: Chamber is not pumping down.. From mdickey at snf.stanford.edu Wed Jul 18 13:38:01 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 18 Jul 2012 13:38:01 -0700 Subject: Shutdown drytek4 SNF 2012-07-17 09:13:05: Pump down problem Message-ID: Replaced blower. User will test system From maxms at snf.stanford.edu Wed Jul 18 13:43:05 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 18 Jul 2012 13:43:05 -0700 Subject: Shutdown drytek4 SNF 2012-07-18 13:43:04: broken Message-ID: still does not go through all the pumps when you hit microreset, same problem as before. can't control it. From mdickey at snf.stanford.edu Wed Jul 18 13:57:34 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 18 Jul 2012 13:57:34 -0700 Subject: Shutdown drytek4 SNF 2012-07-18 13:43:04: broken Message-ID: Retry From mdickey at snf.stanford.edu Wed Jul 18 13:58:18 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 18 Jul 2012 13:58:18 -0700 Subject: Problem drytek4 SNF 2012-07-18 13:58:17: test Message-ID: needs test From jimkruger at snf.stanford.edu Wed Jul 18 17:19:06 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 18 Jul 2012 17:19:06 -0700 Subject: Problem drytek4 SNF 2012-07-18 17:19:05: "Start" Not working Message-ID: micro reset does not help. "start" does not work, acts likesystem is not enabled, but it is. From carterlin at snf.stanford.edu Wed Jul 18 18:02:20 2012 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Wed, 18 Jul 2012 18:02:20 -0700 Subject: Shutdown drytek4 SNF 2012-07-18 18:02:19: Cannot open chamber Message-ID: seasoning run was fine From mtang at snf.stanford.edu Thu Jul 19 08:13:25 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 19 Jul 2012 08:13:25 -0700 Subject: Comment drytek4 SNF 2012-07-19 08:13:24: Update Message-ID: Blower was bad and has been replaced. System undergoing testing. From mdickey at snf.stanford.edu Thu Jul 19 08:25:37 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Jul 2012 08:25:37 -0700 Subject: Shutdown drytek4 SNF 2012-07-18 18:02:19: Cannot open chamber Message-ID: crossover set too high...readjusted and system vents normally Blower changed yesterday From cbaxter at snf.stanford.edu Thu Jul 19 12:05:23 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Jul 2012 12:05:23 -0700 Subject: Problem drytek4 SNF 2012-07-18 13:58:17: test Message-ID: From cbaxter at snf.stanford.edu Thu Jul 19 12:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Jul 2012 12:05:38 -0700 Subject: Problem drytek4 SNF 2012-07-18 17:19:05: "Start" Not working Message-ID: From ntayebi at snf.stanford.edu Thu Jul 19 13:07:22 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Thu, 19 Jul 2012 13:07:22 -0700 Subject: Problem drytek4 SNF 2012-07-19 13:07:21: timer on process 1 not working Message-ID: From cbaxter at snf.stanford.edu Thu Jul 19 13:15:31 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Jul 2012 13:15:31 -0700 Subject: Problem drytek4 SNF 2012-07-19 13:07:21: timer on process 1 not working Message-ID: From jimkruger at snf.stanford.edu Mon Jul 23 18:17:55 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 23 Jul 2012 18:17:55 -0700 Subject: Problem drytek4 SNF 2012-07-23 18:17:55: On "process1",no O2 flow Message-ID: On "process2", O2 flow is OK. So I used process2 No log sheets in book. No check of other gasses. Maybe bad dip-switch on "process1" card? From eenriquez at snf.stanford.edu Tue Jul 24 08:46:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Jul 2012 08:46:43 -0700 Subject: Comment drytek4 SNF 2012-07-24 08:46:42: Update Process 1 Message-ID: PROCESS 1 is down for gas flow problem. None of the gas channels work. Process 2 and Process 3 are functional. From sparacio at snf.stanford.edu Sun Jul 29 02:01:58 2012 From: sparacio at snf.stanford.edu (sparacio at snf.stanford.edu) Date: Sun, 29 Jul 2012 02:01:58 -0700 Subject: Comment drytek4 SNF 2012-07-29 02:01:58: Standby Message-ID: Works fine, but couldn't put in standby mode. Tried micro reset, the pressure just stays at 17. Otherwise fine. From cbaxter at snf.stanford.edu Sun Jul 29 20:10:00 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 29 Jul 2012 20:10:00 -0700 Subject: Comment drytek4 SNF 2012-07-29 20:09:59: Update Message-ID: It looks like an i/o problem, will continue to troubleshoot.. From jperez at snf.stanford.edu Mon Jul 30 07:11:29 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Jul 2012 07:11:29 -0700 Subject: Comment drytek4 SNF 2012-07-29 02:01:58: Standby Message-ID: It takes slow to respond for pump down and you may have to press the start button more than once. If it doesn't pump down don't worry about it.