Problem drytek4 SNF 2012-07-13 23:35:04: plasma flickering

sparacio at snf.stanford.edu sparacio at snf.stanford.edu
Fri Jul 13 23:35:04 PDT 2012


With O2 plasma, at 150mtorr, and 50W of power. When the process started, the plasma began to flicker. Also, Rev. power was very high and when lowered, forward power dropped immediately to zero. Killed the process immediately and did a reset of the machine.




More information about the drytek4-pcs mailing list