From zzp at snf.stanford.edu Wed Jun 13 22:54:12 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Wed, 13 Jun 2012 22:54:12 -0700 Subject: Problem drytek4 SNF 2012-06-13 22:54:11: DC dias lower than normal Message-ID: with RF 100W, only got -1.4V something today, lower than the normal value -2.4V From dwnam at snf.stanford.edu Wed Jun 13 23:54:57 2012 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Wed, 13 Jun 2012 23:54:57 -0700 Subject: Problem drytek4 SNF 2012-06-13 23:54:57: Plasma sparking Message-ID: Plasma keeps sparking and the DC bias is very unstable. From eenriquez at snf.stanford.edu Thu Jun 14 08:40:10 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jun 2012 08:40:10 -0700 Subject: Problem drytek4 SNF 2012-06-13 23:54:57: Plasma sparking Message-ID: No problem found. Ran the user's recipe for 10 min. Plasma was very stable after tuning the matching network. From jperez at snf.stanford.edu Thu Jun 14 12:49:09 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 14 Jun 2012 12:49:09 -0700 Subject: Problem drytek4 SNF 2012-06-13 22:54:11: DC dias lower than normal Message-ID: If tuned correctly DC Bias voltage should be fine. Elmer ran system without a problem. From jperez at snf.stanford.edu Fri Jun 15 09:59:38 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Jun 2012 09:59:38 -0700 Subject: Problem drytek4 SNF 2012-06-15 09:59:37: CHF3 Knob isn't working Message-ID: Can't tell if gas is open or closed From jperez at snf.stanford.edu Fri Jun 15 10:01:21 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Jun 2012 10:01:21 -0700 Subject: Problem drytek4 SNF 2012-06-15 10:01:20: The Cycle hold button isn't working Message-ID: When pressed it stops the etch, it should continue etching by passing the clock. From jperez at snf.stanford.edu Fri Jun 15 10:02:14 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Jun 2012 10:02:14 -0700 Subject: Problem drytek4 SNF 2012-06-15 09:59:37: CHF3 Knob isn't working Message-ID: Elmer fixed the knob for CHF3 From cbaxter at snf.stanford.edu Fri Jun 15 14:36:05 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 15 Jun 2012 14:36:05 -0700 Subject: Problem drytek4 SNF 2012-06-15 10:01:20: The Cycle hold button isn't working Message-ID: Reset the connector on the CPU pcb and ran recipe's 1,2 and 3. From maxms at snf.stanford.edu Tue Jun 26 01:02:41 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Tue, 26 Jun 2012 01:02:41 -0700 Subject: Problem drytek4 SNF 2012-06-26 01:02:40: can't enter standby Message-ID: tried regular tricks and microreset, no help. From mtang at snf.stanford.edu Tue Jun 26 06:20:58 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 26 Jun 2012 06:20:58 -0700 Subject: Problem drytek4 SNF 2012-06-26 06:20:57: do not use C4F8 (F318) Message-ID: Purchasing issues delayed shipping. Replacement cylinder is due today. From latta at snf.stanford.edu Wed Jun 27 16:33:35 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jun 2012 16:33:35 -0700 Subject: Problem drytek4 SNF 2012-06-26 06:20:57: do not use C4F8 (F318) Message-ID: gas online From cbaxter at snf.stanford.edu Sat Jun 30 10:32:28 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 30 Jun 2012 10:32:28 -0700 Subject: Problem drytek4 SNF 2012-06-26 01:02:40: can't enter standby Message-ID: Reset system and put it on stand by..