From faridz at snf.stanford.edu  Fri May 11 10:47:32 2012
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Fri, 11 May 2012 10:47:32 -0700
Subject: Problem drytek4 SNF 2012-05-11 10:47:31: RF power fluctuation for process 1,2,3
Message-ID: <mailman.955.1357938331.25694.drytek4-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri May 11 15:03:51 2012
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 May 2012 15:03:51 -0700
Subject: Problem drytek4 SNF 2012-05-11 10:47:31: RF power fluctuation for process 1,2,3
Message-ID: <mailman.956.1357938331.25694.drytek4-pcs@snf.stanford.edu>

Ran sf6/o2 plasma w/out problem..